Invention Application
- Patent Title: METHODS AND SYSTEMS FOR FABRICATION OF MMIC AND RF DEVICES ON ENGINEERED SUBSTRATES
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Application No.: PCT/US2021/054835Application Date: 2021-10-13
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Publication No.: WO2022081749A1Publication Date: 2022-04-21
- Inventor: ODNOBLYUDOV, Vladimir , BASCERI, Cem
- Applicant: QROMIS, INC. , AKTAS, Ogzur
- Applicant Address: 2306 Walsh Avenue; c/o Qromis, Inc.
- Assignee: QROMIS, INC.,AKTAS, Ogzur
- Current Assignee: QROMIS, INC.,AKTAS, Ogzur
- Current Assignee Address: 2306 Walsh Avenue; c/o Qromis, Inc.
- Agency: LARGENT, Craig C.
- Priority: US63/091,777 2020-10-14
- Main IPC: H01L23/34
- IPC: H01L23/34
Abstract:
A monolithic microwave integrated circuit (MMIC) system includes a growth substrate, a device layer coupled to the growth substrate, a plurality of MMIC device elements coupled to the device layer, and a plurality of metallization structures coupled to the plurality of MMIC device elements. The MMIC system also includes a carrier substrate coupled to the plurality of metallization structures and a cooling structure coupled to the carrier substrate.
Information query
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