- 专利标题： METHOD OF TREATING A COATED FLEXIBLE SUBSTRATE FOR PACKAGING APPLICATIONS
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申请号： PCT/EP2020/087823申请日： 2020-12-23
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公开(公告)号： WO2022135724A1公开(公告)日： 2022-06-30
- 发明人: TIAN, Zheng , VERGHESE, Rajan , DEMUTH, Rainer , LIU, Shasha
- 申请人： APPLIED MATERIALS, INC , TIAN, Zheng , VERGHESE, Rajan , DEMUTH, Rainer , LIU, Shasha
- 申请人地址： 3050 Bowers Avenue; c/o Applied Materials, Inc.; 67 Marina Drive; Schulzenstrasse 6a; Floor 18th, Jingkai Building,
- 专利权人： APPLIED MATERIALS, INC,TIAN, Zheng,VERGHESE, Rajan,DEMUTH, Rainer,LIU, Shasha
- 当前专利权人： APPLIED MATERIALS, INC,TIAN, Zheng,VERGHESE, Rajan,DEMUTH, Rainer,LIU, Shasha
- 当前专利权人地址： 3050 Bowers Avenue; c/o Applied Materials, Inc.; 67 Marina Drive; Schulzenstrasse 6a; Floor 18th, Jingkai Building,
- 代理机构： ZIMMERMANN & PARTNER PATENTANWÄLTE MBB
- 主分类号： C08J7/048
- IPC分类号： C08J7/048 ; C08J7/06 ; C08J7/12 ; C08J7/18 ; B05D3/06
摘要：
A method of treating a coated flexible substrate is described. The method of treating a coated flexible substrate includes providing the coated flexible substrate comprising a flexible substrate including a first surface and a second surface opposite the first surface and at least one barrier layer on the first surface of the flexible substrate and providing a beam of charged particles to the at least one barrier layer and the flexible substrate of the coated flexible substrate simultaneously in a substantially oxygen-free atmosphere.
