Invention Application
- Patent Title: METHOD OF SUBSTRATE CHECKING, AND SUBSTRATE PROCESSING SYSTEM
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Application No.: PCT/EP2021/062616Application Date: 2021-05-12
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Publication No.: WO2022237975A1Publication Date: 2022-11-17
- Inventor: STOCK, Bernhard , LAU, Simon , WEBER, Roland
- Applicant: APPLIED MATERIALS, INC. , STOCK, Bernhard , LAU, Simon , WEBER, Roland
- Applicant Address: 3050 Bowers Avenue; Cornillstr. 18; Lerchenrain 6; Heidtanne 5
- Assignee: APPLIED MATERIALS, INC.,STOCK, Bernhard,LAU, Simon,WEBER, Roland
- Current Assignee: APPLIED MATERIALS, INC.,STOCK, Bernhard,LAU, Simon,WEBER, Roland
- Current Assignee Address: 3050 Bowers Avenue; Cornillstr. 18; Lerchenrain 6; Heidtanne 5
- Agency: ZIMMERMANN & PARTNER PATENTANWÄLTE MBB
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/67259 ; H01L21/67288
Abstract:
A method of substrate checking is described. The method includes placing a substrate (10) on a substrate support (120) in a vacuum processing chamber (101); introducing a gas (20) through the substrate support into a region (150) between the substrate support and the substrate via a gas supply (130); and measuring an actual pressure in the gas supply (130) or the region (150) for determining a substrate defect or an incorrect substrate placement on the substrate support. Further, a substrate processing system (100) is described that is configured for the substrate checking method described herein.
Information query
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