公开(公告)号：EP2936549A1

公开(公告)日：2015-10-28

申请号：EP13866388.5

申请日：2013-12-05

申请人： 3M Innovative Properties Company

发明人： WOLK, Martin, B. ,  FREE, Michael, Benton ,  VOGEL-MARTIN, Margaret ,  SCHWARTZ, Evan, L. ,  MAZUREK, Mieczyslaw, H. ,  COLLIER, Terry, O.

IPC分类号： H01L21/027

CPC分类号： B32B37/025 ,  B29C35/0805 ,  B29C35/0894 ,  B29C37/0067 ,  B29C41/24 ,  B29C59/026 ,  B29C65/528 ,  B29C2035/0827 ,  B29C2035/0833 ,  B29C2059/023 ,  B29K2083/00 ,  B29L2009/005 ,  B29L2031/3475 ,  B32B27/06 ,  B32B38/10 ,  B32B2038/0076 ,  B32B2383/00 ,  B32B2457/20 ,  C23C16/455 ,  G03F7/0002 ,  G03F7/2014

摘要： A method of making patterned structured solid surfaces is disclosed that includes filling a structured template with backfill material to produce a structured transfer film and laminating the structured transfer film to a receptor substrate. The receptor substrate comprises a patterned adhesion promotion layer. The template layer is capable of being removed from the backfill layer while leaving at least a portion of the structured surface of the backfill layer substantially intact. The backfill layer can include at least two different materials, one of which can be an adhesion promotion layer. In some embodiments the backfill layer includes a silsesquioxane such as polyvinyl silsesquioxane. The structured transfer film is a stable intermediate that can be covered temporarily with a release liner for storage and handling.