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1.发明公开Lithographic apparatus and device manufacturing method 有权石版画家Apparat和Verfahren zur Herstellung eines Artikels
公开(公告)号：EP1465013A2
公开(公告)日：2004-10-06
申请号：EP04251078.4
申请日：2004-02-26
发明人： Hol, Sven Antoin Johan , Compter, Johan Cornelis , Loopstra, Eirk Roelof , Vreugdewater, Patricia
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , H02K41/031
摘要： A linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks 11, 12 and an armature 13 comprising three open coil sets. The linear motor may be used to drive a stage, particularly the mask stage, in a lithographic projection apparatus.
摘要翻译： 具有高驱动力，高效率和低法向力的线性电动机包括两个相对的磁体轨道11,12和包括三个开放线圈组的电枢13。 线性电动机可以用于在光刻投影装置中驱动台，特别是掩模台。
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公开(公告)号：EP1465013B1
公开(公告)日：2009-08-12
申请号：EP04251078.4
申请日：2004-02-26
发明人： Hol, Sven Antoin Johan , Compter, Johan Cornelis , Loopstra, Eirk Roelof , Vreugdewater, Patricia
CPC分类号： G03F7/70758 , H02K41/031
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公开(公告)号：EP1465013A3
公开(公告)日：2006-08-09
申请号：EP04251078.4
申请日：2004-02-26
发明人： Hol, Sven Antoin Johan , Compter, Johan Cornelis , Loopstra, Eirk Roelof , Vreugdewater, Patricia
CPC分类号： G03F7/70758 , H02K41/031
摘要： A linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks 11, 12 and an armature 13 comprising three open coil sets. The linear motor may be used to drive a stage, particularly the mask stage, in a lithographic projection apparatus.
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