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    METHODS AND APPARATUS FOR DETECTION OF LARGE LEAKS IN SEALED ARTICLES
    1.
    发明授权
    METHODS AND APPARATUS FOR DETECTION OF LARGE LEAKS IN SEALED ARTICLES 有权
    DEVICE AND METHOD FOR大泄漏密封目标检测

    公开(公告)号：EP1631806B1

    公开(公告)日：2011-04-20

    申请号：EP04754880.5

    申请日：2004-06-09

    申请人： Agilent Technologies, Inc.

    发明人： PERKINS, Charles ,  PALENSTIJN, Pieter, N.

    IPC分类号： G01M3/20

    CPC分类号： G01M3/229 ,  G01M3/202 ,  G01M3/205

    摘要： Methods and apparatus are provided for detection of large leaks in sealed articles. Apparatus for leak detection includes a first sealable chamber configured to receive a test piece containing a trace gas, a second sealable chamber, a first valve coupled between the first and second chambers, a leak detector having a test port, a trace gas permeable member coupled between the second chamber and the test port of the leak detector, a vacuum pump having an inlet, and a second valve coupled between the second chamber and the inlet of the vacuum pump. The permeable member may be quartz, which is permeable to helium when heated. The leak detector may be an ion pump or a helium mass spectrometer leak detector.