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1.发明授权CLEANING METHOD FOR DUV OPTICAL ELEMENTS TO EXTEND THEIR LIFETIME 有权REINIGUNGSVERFAHRENFÜROPTISCHE DUV-ELEMENTE ZURVERLÄNGERUNGIHRER LEBENSZEIT
公开(公告)号：EP2185298B1
公开(公告)日：2012-07-04
申请号：EP08794669.5
申请日：2008-07-23
申请人： Corning Incorporated
发明人： CANGEMI, Michael, J. , FENG, Jiangwei , HAYDEN, Cindy, J. , SABIA, Robert , SCHREIBER, Horst , WANG, Jue
CPC分类号： B08B3/12 , B08B7/0035 , B08B7/028 , B08B2203/005 , G02B1/02 , G02B1/105 , G02B1/14
摘要： The present invention" is directed to a process for coating at least one geometrically defined surface of an optical article's substrate, without generating optical defects, said surface forming a Fresnel lens (2) comprising: providing a removable plastic carrier (4) having a specific thickness and a specific base curvature, depositing a curable coating composition (3) onto either the at least one surface forming a Fresnel lens or the internal surface of the carrier, moving the carrier and the optical article relatively to each other to bring the deposited curable coating composition into contact with either the al least one surface forming a Fresnel lens or the internal surface of the carrier, applying a specific pressure onto the external surface of the carrier to spread out the curable coating composition so as to cover said at least one surface forming a Fresnel lens, curing the layer of curable coating composition and withdrawing the removalbe carrier
摘要翻译： 本发明涉及一种DUV光学元件，所述光学元件包括成形的单晶碱土金属氟化物光学元件，其在暴露于120mJ / cm 2辐射时具有至少12亿脉冲的寿命，其中所述碱土金属为Mg，Ca ，Ba和Sr，或其混合物。
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公开(公告)号：EP2185298A2
公开(公告)日：2010-05-19
申请号：EP08794669.5
申请日：2008-07-23
申请人： Corning Incorporated
发明人： CANGEMI, Michael, J. , FENG, Jiangwei , HAYDEN, Cindy, J. , SABIA, Robert , SCHREIBER, Horst , WANG, Jue
CPC分类号： B08B3/12 , B08B7/0035 , B08B7/028 , B08B2203/005 , G02B1/02 , G02B1/105 , G02B1/14
摘要： The present invention" is directed to a process for coating at least one geometrically defined surface of an optical article's substrate, without generating optical defects, said surface forming a Fresnel lens (2) comprising: providing a removable plastic carrier (4) having a specific thickness and a specific base curvature, depositing a curable coating composition (3) onto either the at least one surface forming a Fresnel lens or the internal surface of the carrier, moving the carrier and the optical article relatively to each other to bring the deposited curable coating composition into contact with either the al least one surface forming a Fresnel lens or the internal surface of the carrier, applying a specific pressure onto the external surface of the carrier to spread out the curable coating composition so as to cover said at least one surface forming a Fresnel lens, curing the layer of curable coating composition and withdrawing the removalbe carrier
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