DETECTION ELEMENT
    1.
    发明公开
    DETECTION ELEMENT 审中-公开

    公开(公告)号:EP3361492A1

    公开(公告)日:2018-08-15

    申请号:EP16853490.7

    申请日:2016-09-30

    IPC分类号: H01J47/06 G01T1/18

    CPC分类号: G01T1/185 G01T1/18 H01J47/06

    摘要: A detection element can obtain a high-resolution radiation image having a high signal intensity and a high S/N ratio. A detection element including a substrate having a through hole, an insulating layer arranged inside of the through hole, a through electrode arranged further to the inner side of the through hole than the insulating layer, a resin layer having insulating properties and having an opening portion exposing the through electrode, a first electrode arranged above the through electrode and the resin layer, the first electrode being connected to the through electrode through the opening portion, and a second electrode arranged above the resin layer, the second electrode being separated from the first electrode.