公开(公告)号：EP1434021A4

公开(公告)日：2009-05-27

申请号：EP02775251

申请日：2002-09-27

申请人： IHI AEROSPACE CO LTD

发明人： KAWASAKI KAZUNORI ,  ASAHI HIROAKI ,  MURAMATSU SHOJI ,  TAKADA TETSUYA

IPC分类号： F27B17/00 ,  F27B17/02 ,  F27D7/06 ,  F27D11/00 ,  F27D19/00 ,  F27D21/02 ,  H05B6/32

CPC分类号： F27D21/02 ,  F27B17/00 ,  F27B17/0016 ,  F27B17/02 ,  F27D7/06 ,  F27D11/00 ,  F27D19/00 ,  H05B6/32

摘要： An electrostatic levitation furnace, wherein three sets of electrodes opposed to each other on three axes orthogonal to each other around the levitated position of a specimen are installed in a vacuum chamber, and an access port directed to the levitated position of the specimen is three-dimensionally disposed in the vacuum chamber, whereby the freedom degree of arrangement of various types of equipment can be increased by increasing the number of the directions for access to the specimen and equipment can also be easily added.