摘要:
The present invention provides a thermoelectric conversion module, comprising plural first electrode films (11, 12, 13) formed apart from each other on the top surface of an insulating body (10), plural p- and n-type thermoelectric semiconductor element films (16, 19) and (17, 18) formed thereon, which are arranged apart from each other so that p- and n-type thermoelectric semiconductor element films alternate with each other, and second electrode films (20) connecting p-type thermoelectric semiconductor element film (19) and n-type thermoelectric semiconductor element film (18) over the gaps between the first electrode films; and a terminal electrode is connected to each of the p-and n-type thermoelectric semiconductor element film (16, 17) at the end; and a production method thereof. The thermoelectric conversion module of the present invention, which can be produced at a low cost using thermoelectric conversion elements having a thin-film structure, is excellent in thermal stability and chemical durability and enables to secure high thermoelectric conversion efficiency.