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公开(公告)号:EP4085479A1
公开(公告)日:2022-11-09
申请号:EP14705981.0
申请日:2014-01-30
申请人: Laser Systems & Solutions of Europe (LASSE) SCREEN Semiconductor Solutions Co. Ltd. , University College Cork - National University of Ireland, Cork
发明人: DUFFY, Ray , SHAYESTEH, Maryam , HUET, Karim
IPC分类号: H01L21/285 , H01L21/268