公开(公告)号：EP0182477A3

公开(公告)日：1988-05-04

申请号：EP85307016

申请日：1985-10-01

申请人： MAXWELL LABORATORIES, INC.

发明人： RIORDAN, JOHN C. ,  PEARLMAN, JAY S.

IPC分类号： G21K1/10 ,  H01J35/18 ,  H01J35/22 ,  H01L21/027 ,  H05G2/00 ,  H01J35/00 ,  G21K1/02

CPC分类号： H05G2/003 ,  G21K1/10 ,  H01J35/18 ,  H01J2235/168

摘要： Filter apparatus for use in x-ray equipment including a repetitively pulsed x-ray source, a window for transmitting x-rays generated by the source to an object to be irradiated, and a vacuum chamber containing the x-ray source and the filter apparatus. The filter apparatus includes a baffle for diffusing hot gases and directing them away from the window. The filter apparatus further includes an ultraviolet light absorber which overlies the window with respect to the x-ray source whereby undesirable components generated with the x-rays by the x-ray source are substantially eliminated prior to reaching the window. Also disclosed is a method of eliminating undesirable by-products of x-ray generation.

摘要翻译： 用于x射线设备的过滤装置，包括重复脉冲的X射线源，用于将源产生的x射线传送到被照射物体的窗口，以及包含x射线源和滤光器装置的真空室 。 过滤装置包括用于扩散热气体并使其远离窗口的挡板。 过滤装置还包括相对于x射线源覆盖窗口的紫外光吸收体，由此在到达窗口之前基本上消除了由x射线源产生的x射线产生的不期望的组分。 还公开了消除x射线产生的不合需要的副产物的方法。