公开(公告)号：EP1262736A4

公开(公告)日：2004-04-21

申请号：EP00980040

申请日：2000-12-11

申请人： MITSUBISHI ELECTRIC CORP ,  KARLSRUHE FORSCHZENT

发明人： OKA TORU ,  NAKAJIMA HAJIME ,  SHIKAI MASAHIRO ,  SHIRATSUKI AKIHIDE ,  MOHR JUERGEN ,  WALLRABE ULRIKE ,  HOLLENBACH UWE

IPC分类号： G01D5/26 ,  G01S7/481 ,  G01S17/46 ,  G01C3/08 ,  G01B11/00

CPC分类号： G01S17/48 ,  G01D5/26 ,  G01S7/4813

摘要： A sensor head comprising a first substrate provided with a light-emitting element and a light-receiving element, an optical structure formed integrally on a second substrate and having a plurality of optical elements for focusing the light-emitted from the light-emitting element and the light reflected from an object to be measured in a direction parallel to the plane of the second substrate, and a lens for focusing the light emitted from the light-emitting element and the light reflected from the object in a direction perpendicular to the plane of the second substrate. Therefore a small sensor head having an improved signal/noise ratio can be produced inexpensively without requiring an expensive three-layer waveguide.

摘要翻译： 1。一种传感器头，其特征在于，具备：具备发光元件和受光元件的第一基板;在第二基板上一体形成的光学结构体，该光学结构体具有用于使从该发光元件发出的光聚焦的多个光学元件; 在与第二基板的平面平行的方向上从待测量物体反射的光以及用于将从发光元件发射的光和从物体反射的光在垂直于第二基板的平面的方向上聚焦的透镜 第二衬底。 因此，不需要昂贵的三层波导，可以廉价地制造具有改善的信噪比的小型传感器头。