LASER SENSOR, SYSTEM AND METHOD FOR SELF-MIXING INTERFEROMETRY

    公开(公告)号:EP4083567A1

    公开(公告)日:2022-11-02

    申请号:EP21171555.2

    申请日:2021-04-30

    摘要: A laser sensor comprises a laser source (12) emitting a laser beam (22), and optics (20) projecting the laser beam (22) as a one- or two-dimensional patterned laser beam (26) onto an object (24) to be examined, such that a distance of the patterned laser beam (26) from the laser source (12) varies along the patterned laser beam (26) projected on the object (24). A detector (14) determines a self-mixing interference signal generated by laser light of the patterned laser beam (26) reflected from the object (24) back into the laser source (12). Circuitry (18) spectrally analyzes the self-mixing interference signal and extracts from the spectrum of the self-mixing interference signal multiple frequencies indicative of multiple distances along the patterned laser beam (26) from the laser source (12) and/or multiple velocities along the patterned laser beam (26) with respect to the laser source (12). A system with such a laser sensor and a related method and computer program product are also disclosed.