A complementary electrostatic driving apparatus for a micro-actuator
    2.
    发明公开
    A complementary electrostatic driving apparatus for a micro-actuator 失效
    Komplementäreelektrostatische Anregungsvorrichtungfürein Mikro-Betätigungsorgan

    公开(公告)号:EP0840092A2

    公开(公告)日:1998-05-06

    申请号:EP97308763.8

    申请日:1997-10-31

    IPC分类号: G01C19/56

    摘要: An electrostatic driving apparatus for a microactuator is provided in which to prevent an excitation signal from being mixed with a sensing signal via the parasitic path formed of parasitic capacitance according to the structure of the microactuator and vibration characteristics thereof, which cause noise, signals having opposite polarities are applied to activating vibration plates (21a,21b) using an inverter (27) such that the activating vibration signals of each plate, which cause noise, are offset, thereby improving the signal-to-noise ratio.

    摘要翻译: 提供了一种用于微致动器的静电驱动装置,用于根据微致动器的结构和振动特性,通过由寄生电容形成的寄生路径,使感应信号与感测信号混合,从而产生噪声,具有相反的信号 使用逆变器(27)将极性施加到启动振动板(21a,21b),使得引起噪声的每个板的启动振动信号被偏移,从而提高信噪比。