SYSTEM FOR SCANNING A PULSED LASER BEAM
    1.
    发明公开
    SYSTEM FOR SCANNING A PULSED LASER BEAM 审中-公开
    扫描脉冲激光束的系统

    公开(公告)号:EP3300682A1

    公开(公告)日:2018-04-04

    申请号:EP17192763.5

    申请日:2014-03-04

    摘要: A system for photoaltering a region of a material, the region having a first and second portions and a periphery, the system comprising a laser configured to produce a pulsed laser beam, a controller configured to select at least a first pattern and a second pattern, the first pattern having a first maximum acceleration associated with the second portion, the second pattern having a second maximum acceleration associated with the second portion, the second maximum acceleration being less than the first maximum acceleration and a scanner operable in response to the controller to scan the pulsed laser beam in the first portion of the region with the first pattern and scan the pulsed laser beam in the second portion of the region with the second pattern, wherein the second pattern comprises scanning the pulsed laser beam in a raster pattern.

    摘要翻译: 一种用于对材料区域进行光致变换的系统,所述区域具有第一部分和第二部分以及外围,所述系统包括被配置为产生脉冲激光束的激光器,被配置为至少选择第一图案和第二图案的控制器, 所述第一模式具有与所述第二部分相关联的第一最大加速度,所述第二模式具有与所述第二部分相关联的第二最大加速度,所述第二最大加速度小于所述第一最大加速度,以及扫描器,可响应于所述控制器扫描而进行扫描 脉冲激光束在具有第一图案的区域的第一部分中,并且利用第二图案在区域的第二部分中扫描脉冲激光束,其中第二图案包括以光栅图案扫描脉冲激光束。

    SYSTEM FOR SCANNING A PULSED LASER BEAM
    3.
    发明公开
    SYSTEM FOR SCANNING A PULSED LASER BEAM 有权
    系统ZUR ABTASTUNG EINES GEPULSTEN LASERSTRAHLS

    公开(公告)号:EP2967750A1

    公开(公告)日:2016-01-20

    申请号:EP14713980.2

    申请日:2014-03-04

    摘要: Systems and methods of photoaltering a region of a material using a pulsed laser beam. The method includes scanning the pulsed laser beam in a first portion of the region with a first pattern, scanning the pulsed laser beam in a second portion of the region with a second pattern, and separating a flap of the material at the region. The system includes a laser, a controller selecting at least first and second patterns, and a scanner operable in response to the controller. The first pattern has a first maximum acceleration associated with the second portion, and the second pattern has a second maximum acceleration associated with the second portion. The second maximum acceleration is less than the first maximum acceleration. The scanner scans the pulsed laser beam from the laser in the first portion with the first pattern and in the second portion with the second pattern.

    摘要翻译: 使用脉冲激光束光刻反射材料区域的系统和方法。 该方法包括以第一图案在该区域的第一部分中扫描脉冲激光束,以第二图案在该区域的第二部分中扫描脉冲激光束,并在该区域分离材料的瓣。 该系统包括激光器,选择至少第一和第二图案的控制器以及响应于控制器可操作的扫描仪。 第一图案具有与第二部分相关联的第一最大加速度,并且第二图案具有与第二部分相关联的第二最大加速度。 第二个最大加速度小于第一个最大加速度。 扫描仪在具有第一图案的第一部分中扫描来自激光器的脉冲激光束,并且在第二部分中扫描具有第二图案的脉冲激光束。