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1.
公开(公告)号:EP3716417B1
公开(公告)日:2024-06-05
申请号:EP18881066.7
申请日:2018-11-19
IPC分类号: H01S5/022 , H01S5/02218 , H01S5/023 , H01S5/40 , H01S5/02315 , H01S5/02326 , H01S5/0238 , H01L33/48 , H01L33/64 , H01S5/024 , H01L23/12 , H01L25/13
CPC分类号: H01S5/02469 , H01S5/0238 , H01S5/02326 , H01S5/02315 , H01L2933/003320130101 , H01L33/641 , H01L33/642 , H01L33/486 , H01L2933/007520130101 , H01S5/4031 , H01S5/02218
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公开(公告)号:EP3916934B1
公开(公告)日:2024-09-18
申请号:EP20745019.8
申请日:2020-01-13
CPC分类号: H01S5/02208 , H01S5/02218 , H01S5/02253 , H01S5/02257 , H01S5/02469 , H01S5/02345
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