公开(公告)号：EP1097464A2

公开(公告)日：2001-05-09

申请号：EP00930380.1

申请日：2000-05-04

Applicant: Etec Systems, Inc.

Inventor： Muray, Lawrence P. ,  Kim, Ho-Seob ,  Chang, T. H. Philip

IPC: H01J37/317 ,  H01J37/28 ,  H01J37/304 ,  G03F9/00

CPC classification number: G01Q30/02 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/1205 ,  H01J2237/2818 ,  Y10S977/707 ,  Y10S977/849 ,  Y10S977/86 ,  Y10S977/869 ,  Y10S977/874 ,  Y10S977/881 ,  Y10S977/887

Abstract: An apparatus for surface inspection and processing of a wafer (12) includes a microcolumn (14) and an associated scanning probe microscope (16). The microcolumn enables high speed scanning of the wafer at a relatively high resolution, while the scanning probe microscope provides atomic resolution of highly localized areas of the wafer. The microcolumn and scanning probe microscope can be partially fabricated out of the same substrate. Additionally, the microcolumn and scanning probe microscope can be a portion of an array of microcolumns and/or scanning probe microscopes. The apparatus may be used for imaging, lithography and spectroscopy.

公开(公告)号：EP1070334A1

公开(公告)日：2001-01-24

申请号：EP00910100.7

申请日：2000-02-07

Applicant: Etec Systems, Inc.

Inventor： LEE, Kim, Y. ,  KIM, Ho-Seob ,  RISHTON, Stephen, A. ,  CHANG, Tai-Hon, Philip

IPC: H01J9/18 ,  H01J37/12

CPC classification number: B82Y15/00 ,  H01J9/18 ,  H01J37/12 ,  H01J2237/1205

Abstract: A method and the associated apparatus for alignment and assembly of microlenses and microcolumns in which aligning structures such as rigid fibers are used to precisely align multiple microlens components. Alignment openings are formed in the microlens components and standard optical fibers are threaded through the openings in each microlens component as they are stacked. The fibers provide sufficient stiffness and stability to the structure to precisely align the apertures of the microlens components and thereby allow for increased assembly efficiency over traditional microlens and microcolumn bonding techniques.

公开(公告)号：EP0073189A4

公开(公告)日：1983-07-08

申请号：EP81901449

申请日：1981-04-30

Applicant: VEECO INSTR INC

Inventor： WESTERBERG EUGENE R ,  CONE DONALD R

IPC: H01J9/02 ,  H01J37/317 ,  H01L21/306 ,  H01J29/46

CPC classification number: H01L21/30608 ,  H01J9/02 ,  H01J37/3177 ,  H01J2237/0453 ,  H01J2237/1205

Abstract: Method of fabricating aperture and lens array plates (100, 200) in silicon using photo or electron beam lithographic patterning followed by indiffusion of boron and anisotropic silicon etching and assembling to form screen lenses. In one embodiment, a screen lens is formed of one each aperture and lens plate (100, 200), mounted back-to-back. In another embodiment, a screen lens is formed of a single lens (or aperture) plate (400).