利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

23 条记录 (耗时 0.013 秒)

    Displacement information detection apparatus
    11.
    发明公开
    Displacement information detection apparatus 失效
    Gerätzur Detektion von Verschiebungsinformation。

    公开(公告)号：EP0577088A2

    公开(公告)日：1994-01-05

    申请号：EP93110388.1

    申请日：1993-06-29

    申请人： CANON KABUSHIKI KAISHA

    发明人： Kato, Shigeki ,  Ishizuka, Koh ,  Kondo, Hiroshi ,  Ishii, Satoshi ,  Kaneda, Yasushi

    IPC分类号： G01D5/38 ,  G01D5/34

    CPC分类号： G01D5/34715 ,  G01D5/38

    摘要： A displacement information detection apparatus used in the field of machine tools, measuring apparatus, and the like in order to detect linear shifting conditions and rotary shifting conditions of an object is disclosed. The apparatus can be miniaturized and its construction saves labour. Further, a detection device suitable for the apparatus and a drive control apparatus using this displacement information detection apparatus are disclosed.

    摘要翻译： 公开了一种用于检测物体的线性移动条件和旋转移动条件的机床，测量装置等领域中的位移信息检测装置。 该设备可以小型化，其索具节省人力。 此外，公开了适用于该装置的检测装置和使用该位移信息检测装置的驱动控制装置。

    Interferometry system
    12.
    发明公开
    Interferometry system 审中-公开
    Interferometriersystem

    公开(公告)号：EP1785691A3

    公开(公告)日：2010-06-02

    申请号：EP06123709.5

    申请日：2006-11-08

    申请人： Canon Kabushiki Kaisha

    发明人： Kato, Shigeki

    IPC分类号： G01B9/02

    CPC分类号： G01B9/02081 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70

    摘要： Beams having wavelengths of λ1 and λ2 individually emitted from two light sources are combined through an optical fiber (25). The combined beam is emitted from an output end face of the optical fiber and then separated by a polarizing beam splitter (27). A first separated beam is reflected by a measurement target (S), whereas a second separated beam is reflected by a reference mirror (30).
    Both beams are combined, and the combined beam is separated into a beam having a wavelength of λ1 and that of λ2. The separated beams enter respective photoelectric conversion elements (36c, 36e). By obtaining one period of an electric signal having a sinusoidal wave for a displacement of (1/2)λ1 and that of (1/2)λ2, a displacement gauge for measuring the amount of displacement of a measurement target is provided.

    Interferometry system
    13.
    发明公开
    Interferometry system 审中-公开
    干涉测量系统

    公开(公告)号：EP1785691A2

    公开(公告)日：2007-05-16

    申请号：EP06123709.5

    申请日：2006-11-08

    申请人： Canon Kabushiki Kaisha

    发明人： Kato, Shigeki

    IPC分类号： G01B9/02

    CPC分类号： G01B9/02081 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70

    摘要： Beams having wavelengths of λ1 and λ2 individually emitted from two light sources are combined through an optical fiber (25). The combined beam is emitted from an output end face of the optical fiber and then separated by a polarizing beam splitter (27). A first separated beam is reflected by a measurement target (S), whereas a second separated beam is reflected by a reference mirror (30).
    Both beams are combined, and the combined beam is separated into a beam having a wavelength of λ1 and that of λ2. The separated beams enter respective photoelectric conversion elements (36c, 36e). By obtaining one period of an electric signal having a sinusoidal wave for a displacement of (1/2)λ1 and that of (1/2)λ2, a displacement gauge for measuring the amount of displacement of a measurement target is provided.

    摘要翻译： 通过光纤（25）将从两个光源单独发射的波长为λ1和λ2的光束合并。 组合光束从光纤的输出端面发射，然后被偏振分束器（27）分开。 第一分离光束由测量目标（S）反射，而第二分离光束由参考反射镜（30）反射。 两个光束被组合，并且组合的光束被分成波长为λ1和λ2的光束。 分离的光束进入相应的光电转换元件（36c，36e）。 通过获得对于（1/2）λ1和（1/2）λ2的位移具有正弦波的一个周期的电信号，提供了用于测量测量目标的位移量的位移计。

    Optical interference apparatus and position detection apparatus
    15.
    发明公开
    Optical interference apparatus and position detection apparatus 审中-公开
    光学干涉和位置检测装置

    公开(公告)号：EP1113243A2

    公开(公告)日：2001-07-04

    申请号：EP00128543.6

    申请日：2000-12-27

    申请人： CANON KABUSHIKI KAISHA

    发明人： Kato, Shigeki

    IPC分类号： G01B11/02 ,  G01B11/14

    CPC分类号： G01B11/14 ,  G01B11/026

    摘要： An optical interference apparatus includes a light source, a beam splitter for splitting a light beam from said light source, a reference surface by which one split light beam from said beam splitter is reflected to propagate backward through the optical path, the light beam from said reference surface and the other split light beam which emerges from said beam splitter, is reflected by an object to be detected, and returns, being combined by said beam splitter and the combined light being finally used as interference light, and the two split light beams emerging from said beam splitter as convergent light, and an optical element having a function of converging a light beam or changing a divergent state of the light beam, said optical element being inserted in an optical path of one of the split light beams emerging from said beam splitter, and the reflected light beams from converging at said beam splitter positions of the two split light beams being combined as spherical waves with curvatures equal to each other owing to an effect of said optical element.

    Interferometer
    20.
    发明公开
    Interferometer 有权
    干涉仪

    公开(公告)号：EP2336714A1

    公开(公告)日：2011-06-22

    申请号：EP10191358.0

    申请日：2010-11-16

    申请人： Canon Kabushiki Kaisha

    发明人： Kato, Shigeki

    IPC分类号： G01B9/02

    CPC分类号： G01B9/02064 ,  G01B9/02018 ,  G01B9/02057 ,  G01B9/0209 ,  G01B2290/70

    摘要： An interferometer comprises: a light source (1); a first polarization beam splitter (2P) configured to reflect, as reference light, a first polarization component of light emitted from the light source, and to transmit, as measurement light, a second polarization component of the light emitted from the light source; a birefringent-material element (8) located between the light source and the first polarization beam splitter; and a light-receiving device (16) configured to receive an interfering light generated by interference of the measurement light transmitted through the first polarization beam splitter, reflected by a reflecting surface (4b) to be measured, and transmitted through the first polarization beam splitter, with the reference light reflected by the first polarization beam splitter. The interferometer is configured such that the reference light and the measurement light pass through the birefringent-material element between the first polarization beam splitter and the light-receiving device.

    摘要翻译： 干涉仪包括：光源（1）; 第一偏振分束器（2P），其被配置为将从所述光源发射的光的第一偏振分量作为参考光反射，并且将从所述光源发射的光的第二偏振分量作为测量光透射; 位于光源和第一偏振分束器之间的双折射材料元件（8）; 以及光接收装置（16），其被配置为接收由被测量的反射表面（4b）反射并透射通过所述第一偏振分束器的透射通过所述第一偏振分束器的测量光的干涉而产生的干涉光 由第一偏振分束器反射的参考光。 干涉仪被配置为使得参考光和测量光穿过第一偏振分束器和光接收装置之间的双折射材料元件。