公开(公告)号：EP1461142B1

公开(公告)日：2012-06-20

申请号：EP03712213.2

申请日：2003-01-07

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)

发明人： LAGARDE, Thierry ,  PELLETIER, Jacques ,  ARNAL, Yves Alban-Marie

IPC分类号： B01D71/02 ,  G03F7/00 ,  B01D69/02 ,  B01D39/16 ,  B01D67/00

CPC分类号： B01D67/0034 ,  B01D39/16 ,  B01D67/003 ,  B01D67/0062 ,  B01D69/02 ,  B01D71/022 ,  B01D2323/34 ,  B01D2325/021 ,  G03F7/0015 ,  Y10T428/24273

摘要： The invention relates to a method of producing a sheet comprising through pores. The inventive method comprises the following steps, consisting in: preparing a sheet having a thickness of between 5νm and a few tens of micrometers which can be etched by means of a lithographic operation; producing a mask on one face of the sheet, said mask having an etching selectivity S of at least 5; depositing a layer of photosensitive resin on the aforementioned mask; creating through pores in the layer of resin by means of photolithography; through etching the mask through the pores in the resin layer; and through anisotropic etching the sheet from the pores in the mask in order to produce pores in the sheet which have a shape factor that is greater than 5. The invention is suitable for use in the production of micronic and submicronic filters.