MANUFACTURING METHOD OF RADIATION DETECTING APPARATUS, AND RADIATION DETECTING APPARATUS AND RADIATION IMAGING SYSTEM
    12.
    发明公开
    MANUFACTURING METHOD OF RADIATION DETECTING APPARATUS, AND RADIATION DETECTING APPARATUS AND RADIATION IMAGING SYSTEM 审中-公开
    方法放射线检测机构及放射线检测装置以及放射线成像系统,

    公开(公告)号:EP2223339A2

    公开(公告)日:2010-09-01

    申请号:EP08848253.4

    申请日:2008-11-04

    IPC分类号: H01L27/148

    CPC分类号: H01L27/14663

    摘要: The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.