DRY ETHCING AGENT
    12.
    发明公开
    DRY ETHCING AGENT 审中-公开
    TROCKENÄTZMITTEL

    公开(公告)号:EP2733725A1

    公开(公告)日:2014-05-21

    申请号:EP12818349.8

    申请日:2012-06-13

    IPC分类号: H01L21/3065

    摘要: [Problem] To provide a dry etching agent having little effect on the global environment but having the required performance.
    [Solution] Provided is a dry etching agent containing, each at a specific vol%: (A) a fluorine-containing unsaturated hydrocarbon represented by the formula

            C a F b H c

    (In the formula, a, b and c are each positive integers and satisfy the correlations of 2≤a≤5, c b+c and b≤a+c, excluding the case where a=3, b=4 or c=2.); (B) at least one kind of gas selected from the group consisting of O 2 , O 3 , CO, CO 2 , COCl 2 , COF 2 , F 2 , NF 3 , Cl 2 , Br 2 , I 2 , and YF n (where Y is Cl, Br or I and n is an integer of 1 to 5); and (C) at least one kind of gas selected from the group consisting of N 2 , He, Ar, Ne, Xe, and Kr.

    摘要翻译: 提供对全球环境几乎没有影响但具有所需性能的干蚀刻剂。 [溶液]本发明提供一种干蚀刻剂,其特征在于含有:(A)由下式表示的含氟不饱和烃:ƒ€ƒ€ƒ€ƒ€ƒ€ƒCa F b H c(在公式中,a,b和c分别为正整数,满足2‰¤a‰¤5,c b + c和b‰¤a+ c ,不包括a = 3,b = 4或c = 2的情况)。 (B)选自由O 2,O 3,CO,CO 2,COCl 2,COF 2,F 2,NF 3,Cl 2,Br 2,I 2和YF n组成的组中的至少一种气体 (其中Y为Cl,Br或I,n为1〜5的整数); 和(C)选自由N 2,He,Ar,Ne,Xe和Kr组成的组中的至少一种气体。

    PRODUCTION METHOD FOR 1-CHLORO-3,3,3-TRIFLUOROPROPENE
    14.
    发明公开
    PRODUCTION METHOD FOR 1-CHLORO-3,3,3-TRIFLUOROPROPENE 有权
    HERSTELLUNGSVERFAHRENFÜR1-CHLOR-3,3,3-TRIFLUORPROPEN

    公开(公告)号:EP2799413A1

    公开(公告)日:2014-11-05

    申请号:EP12863812.9

    申请日:2012-11-22

    IPC分类号: C07C17/25 C07C21/18 C07B61/00

    摘要: A production method of 1-chloro-3,3,3-trifluoropropene according to the present invention includes reaction of 1,1,1,3,3-pentachloropropane with hydrogen fluoride, characterized in that the concentrations of respective catalytic components in the 1,1,1,3,3-pentachloropropane as the raw material is controlled to a predetermined level or less. By controlling the concentrations of the respective catalytic components in the 1,1,1,3,3-pentachloropropane to the predetermined level or less, it is possible to improve the problems of shortening of catalyst life, retardation of reaction and scaling or corrosion of equipment in the production of the 1-chloro-3,3,3-trifluoropropene. In addition, the 1,1,1,3,3-pentachloropropane can be obtained selectively with high yield by telomerization reaction of carbon tetrachloride and vinyl chloride. The present invention is thus useful as the method for industrially advantageous, high-yield production of the 1-chloro-3,3,3-trifluoropropene.

    摘要翻译: 根据本发明的1-氯-3,3,3-三氟丙烯的制备方法包括1,1,1,3,3-五氯丙烷与氟化氢的反应,其特征在于所述催化剂组分在1 作为原料的1,1,3,3-五氯丙烷被控制在预定水平以下。 通过将1,1,1,3,3-五氯丙烷中的各催化剂组分的浓度控制在预定水平或更低水平,可以改善催化剂寿命缩短,反应延迟和结垢或腐蚀的问题 设备生产的1-氯-3,3,3-三氟丙烯。 另外,通过四氯化碳和氯乙烯的调聚反应可以选择性地获得1,1,1,3,3-五氯丙烷。 因此,本发明可用作工业上有利的高产率生产1-氯-3,3,3-三氟丙烯的方法。

    PROCESS FOR PRODUCING TRANS-1,3,3,3-TETRAFLUOROPROPENE
    15.
    发明公开
    PROCESS FOR PRODUCING TRANS-1,3,3,3-TETRAFLUOROPROPENE 审中-公开
    VERFAHREN ZUR HERSTELLUNG VON TRANS-1,3,3,3-TETRAFLUORPROPEN

    公开(公告)号:EP2636662A1

    公开(公告)日:2013-09-11

    申请号:EP11839315.6

    申请日:2011-09-27

    摘要: A production process of trans-1,3,3,3-tetrafluoropropene according to the present invention includes: a reaction step of reacting 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to form trans-1,3,3,3-tetrafluoropropene and obtain a reaction product A containing the formed trans-1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifloropropene and hydrogen fluoride and by-produced cis-1,3,3,3-tetrafluoropropene, 1,1,1,3,3-pentafluoropropane and hydrogen chloride; a rough separation step of distilling the reaction product A obtained in the reaction step to recover a distillation bottom product containing the 1-chloro-3,3,3-trifloropropene and hydrogen fluoride, and then, supplying the recovered distillation bottom product to the reaction step; a hydrogen fluoride separation step of recovering the hydrogen fluoride from a residue B remaining after the recovery of the distillation bottom product in the rough separation step and supplying the recovered hydrogen fluoride to the reaction step; a hydrogen chloride separation step of bringing a residue C remaining after the recovery of the hydrogen fluoride in the hydrogen fluoride separation step into contact with water or an aqueous sodium hydroxide solution to thereby separate the hydrogen chloride; a dehydration drying step of dehydrating a residue D remaining after the separation of the hydrogen chloride in the hydrogen chloride separation step; and a purification step of obtaining the trans-1,3,3,3-tetrafluoropropene by distillation of a residue E remaining after the dehydration in the dehydration drying step. It is possible in the present production process to reuse the unreacted reactants and produce the target compound efficiently.

    摘要翻译: 根据本发明的反式-1,3,3,3-四氟丙烯的制备方法包括:使1-氯-3,3,3-三氟丙烯与氟化氢反应形成反式-1,3,3 得到含有形成的反式-1,3,3,3-四氟丙烯,未反应的1-氯-3,3,3-三氟丙烯和氟化氢的反应产物A和副产的顺式-1,3,3,3-四氟丙烯, 3,3-四氟丙烯,1,1,1,3,3-五氟丙烷和氯化氢; 蒸馏在反应步骤中获得的反应产物A的粗分离步骤,以回收含有1-氯-3,3,3-三氟丙烯和氟化氢的蒸馏塔底产物,然后将回收的蒸馏塔底产物供应至反应 步; 氟化氢分离步骤,在粗分离步骤中回收蒸馏塔底产物后剩余的残渣B回收氟化氢,并将回收的氟化氢供应到反应步骤; 将在氟化氢分离步骤中的氟化氢回收后剩余的残渣C与水或氢氧化钠水溶液接触,从而分离氯化氢的氯化氢分离步骤; 脱水干燥步骤,使氯化氢分离步骤中的氯化氢分离后剩余的残渣D脱水; 以及通过蒸馏在脱水干燥步骤中脱水后残留的残渣E获得反式1,3,3,3-四氟丙烯的纯化步骤。 在本生产方法中可以重新使用未反应的反应物并有效地生产目标化合物。

    METHOD FOR DEHYDRATING HYDROFLUOROCARBON OR HYDROCHLOROFLUOROCARBON, AND METHOD FOR PRODUCING 1,3,3,3-TETRAFLUOROPROPANE USING SAID DEHYDRATING METHOD
    16.
    发明公开
    METHOD FOR DEHYDRATING HYDROFLUOROCARBON OR HYDROCHLOROFLUOROCARBON, AND METHOD FOR PRODUCING 1,3,3,3-TETRAFLUOROPROPANE USING SAID DEHYDRATING METHOD 有权
    的脱水方法的氢氟碳化合物或HYDROCHLORFLUORKARBONAT和工艺用于生产1,3,3,3-四氟丙烷在这个过程中脱水

    公开(公告)号:EP2617699A1

    公开(公告)日:2013-07-24

    申请号:EP11824861.6

    申请日:2011-07-05

    摘要: There are provided a dehydration process of a hydrofluorocarbon or hydrochlorofluorocarbon, which can be done by a simple equipment, and a continuous production process of 1,3,3,3-tetrafluoropropene using the dehydration process. The dehydration process of the hydrofluorocarbon or hydrochlorofluorocarbon includes cooling the hydrofluorocarbon or hydrochlorofluorocarbon in gaseous form containing at least water by a heat exchanger, thereby condensing and liquefying the hydrofluorocarbon or hydrochlorofluorocarbon while freezing and solidifying the water. The production method of the 1,3,3,3-tetrafluoropropene includes a first step for fluorinating 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to obtain a mixture of the 1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifluoropropene, hydrogen fluoride, hydrogen chloride and by-products, or dehydrofluorinating 1,1,1,3,3-pentafluoropropane to obtain a mixture of the 1,3,3,3-tetrafluoropropene, unreacted 1,1,1,3,3-pentafluoropropane and by-products, a second step for removing the acidic component, a third step for dehydrating the 1,3,3,3-tetrafluoropropene by the above dehydration process, and a fourth step for purifying the 1,3,3,3-tetrafluoropropene by distillation.

    摘要翻译: 本发明提供一种氢氟烃或氢氯氟烃,这可以通过一个简单的设备来完成,并使用脱水过程1,3,3,3-四氟丙烯的连续生产过程中的脱水过程。 氢氟烃或氢氯氟烃的脱水过程包括至少含有水通过热交换器冷却气态形式氢氟烃或氢氯氟烃,从而冷凝和液化氢氟烃或氢氯氟烃而冻结,并固化该水。 的1,3,3,3-四氟丙烯的制造方法,包括一种氟化1-氯-3,3,3-三氟丙烯与氟化氢以获得1,3,3,3-四氟丙烯的混合物的第一步骤中, 未反应的1-氯-3,3,3-三氟丙烯,氟化氢,氯化氢和副产物,或脱氟化氢1,1,1,3,3-五氟丙烷以得到1,3,3,3-的混合物 四氟丙烯,未反应的1,1,1,3,3-五氟丙烷和副产物,以除去酸性成分,通过上述脱水工序的脱水1,3,3,3-四氟丙烯的第三步骤的第二步骤中,和 用于通过蒸馏纯化的1,3,3,3-四氟丙烯的第四步骤。

    METHOD FOR PRODUCING 3,3,3-TRIFLUOROPROPYNE
    17.
    发明授权
    METHOD FOR PRODUCING 3,3,3-TRIFLUOROPROPYNE 有权
    生产3,3,3-三氟丙烯的方法

    公开(公告)号:EP2143702B1

    公开(公告)日:2012-03-21

    申请号:EP08739870.7

    申请日:2008-04-04

    IPC分类号: C07C17/25 C07C21/22

    CPC分类号: C07C17/25 C07C21/22

    摘要: Disclosed is a method for producing 3,3,3-trifluoropropyne, which is characterized in that a (Z)-1-halogeno-3,3,3-trifluoropropene represented by the formula [1] is reacted with a base. This method enables to produce 3,3,3-trifluoropropyne with high yield. Since waste disposal is easy in this method, this production method is commercially advantageous.

    摘要翻译: 公开了一种生产3,3,3-三氟丙炔的方法,其特征在于由式[1]表示的(Z)-1-卤代-3,3,3-三氟丙烯与碱反应。 该方法能够以高产率生产3,3,3-三氟丙炔。 由于在这种方法中废物处理容易,所以这种生产方法在商业上是有利的。