摘要:
[Problem] To provide a dry etching agent having little effect on the global environment but having the required performance. [Solution] Provided is a dry etching agent containing, each at a specific vol%: (A) a fluorine-containing unsaturated hydrocarbon represented by the formula
C a F b H c
(In the formula, a, b and c are each positive integers and satisfy the correlations of 2≤a≤5, c b+c and b≤a+c, excluding the case where a=3, b=4 or c=2.); (B) at least one kind of gas selected from the group consisting of O 2 , O 3 , CO, CO 2 , COCl 2 , COF 2 , F 2 , NF 3 , Cl 2 , Br 2 , I 2 , and YF n (where Y is Cl, Br or I and n is an integer of 1 to 5); and (C) at least one kind of gas selected from the group consisting of N 2 , He, Ar, Ne, Xe, and Kr.
摘要翻译:提供对全球环境几乎没有影响但具有所需性能的干蚀刻剂。 [溶液]本发明提供一种干蚀刻剂,其特征在于含有:(A)由下式表示的含氟不饱和烃:ƒ€ƒ€ƒ€ƒ€ƒ€ƒCa F b H c(在公式中,a,b和c分别为正整数,满足2‰¤a‰¤5,c b + c和b‰¤a+ c ,不包括a = 3,b = 4或c = 2的情况)。 (B)选自由O 2,O 3,CO,CO 2,COCl 2,COF 2,F 2,NF 3,Cl 2,Br 2,I 2和YF n组成的组中的至少一种气体 (其中Y为Cl,Br或I,n为1〜5的整数); 和(C)选自由N 2,He,Ar,Ne,Xe和Kr组成的组中的至少一种气体。
摘要:
A production method of 3,3,3-trifluoropropene includes the step of hydrogenating 1-chloro-3,3,3-trifluoropropene with hydrogen (H 2 ) in a gas phase in the presence of either of: (A) a catalyst having carried on a carrier at least one kind of transition metal selected from the group consisting of ruthenium, nickel, rhodium, iridium, iron, osmium and cobalt, or an oxide of said transition metal; (B) an oxide catalyst of copper and manganese; and (C) a catalyst having carried on a carrier palladium and at least one kind of element selected from the group consisting of bismuth, zinc, copper, silver, lanthanum, lead, zirconium, niobium, hafnium, magnesium, tin and arsenic.
摘要:
A production method of 1-chloro-3,3,3-trifluoropropene according to the present invention includes reaction of 1,1,1,3,3-pentachloropropane with hydrogen fluoride, characterized in that the concentrations of respective catalytic components in the 1,1,1,3,3-pentachloropropane as the raw material is controlled to a predetermined level or less. By controlling the concentrations of the respective catalytic components in the 1,1,1,3,3-pentachloropropane to the predetermined level or less, it is possible to improve the problems of shortening of catalyst life, retardation of reaction and scaling or corrosion of equipment in the production of the 1-chloro-3,3,3-trifluoropropene. In addition, the 1,1,1,3,3-pentachloropropane can be obtained selectively with high yield by telomerization reaction of carbon tetrachloride and vinyl chloride. The present invention is thus useful as the method for industrially advantageous, high-yield production of the 1-chloro-3,3,3-trifluoropropene.
摘要:
A production process of trans-1,3,3,3-tetrafluoropropene according to the present invention includes: a reaction step of reacting 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to form trans-1,3,3,3-tetrafluoropropene and obtain a reaction product A containing the formed trans-1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifloropropene and hydrogen fluoride and by-produced cis-1,3,3,3-tetrafluoropropene, 1,1,1,3,3-pentafluoropropane and hydrogen chloride; a rough separation step of distilling the reaction product A obtained in the reaction step to recover a distillation bottom product containing the 1-chloro-3,3,3-trifloropropene and hydrogen fluoride, and then, supplying the recovered distillation bottom product to the reaction step; a hydrogen fluoride separation step of recovering the hydrogen fluoride from a residue B remaining after the recovery of the distillation bottom product in the rough separation step and supplying the recovered hydrogen fluoride to the reaction step; a hydrogen chloride separation step of bringing a residue C remaining after the recovery of the hydrogen fluoride in the hydrogen fluoride separation step into contact with water or an aqueous sodium hydroxide solution to thereby separate the hydrogen chloride; a dehydration drying step of dehydrating a residue D remaining after the separation of the hydrogen chloride in the hydrogen chloride separation step; and a purification step of obtaining the trans-1,3,3,3-tetrafluoropropene by distillation of a residue E remaining after the dehydration in the dehydration drying step. It is possible in the present production process to reuse the unreacted reactants and produce the target compound efficiently.
摘要:
There are provided a dehydration process of a hydrofluorocarbon or hydrochlorofluorocarbon, which can be done by a simple equipment, and a continuous production process of 1,3,3,3-tetrafluoropropene using the dehydration process. The dehydration process of the hydrofluorocarbon or hydrochlorofluorocarbon includes cooling the hydrofluorocarbon or hydrochlorofluorocarbon in gaseous form containing at least water by a heat exchanger, thereby condensing and liquefying the hydrofluorocarbon or hydrochlorofluorocarbon while freezing and solidifying the water. The production method of the 1,3,3,3-tetrafluoropropene includes a first step for fluorinating 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to obtain a mixture of the 1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifluoropropene, hydrogen fluoride, hydrogen chloride and by-products, or dehydrofluorinating 1,1,1,3,3-pentafluoropropane to obtain a mixture of the 1,3,3,3-tetrafluoropropene, unreacted 1,1,1,3,3-pentafluoropropane and by-products, a second step for removing the acidic component, a third step for dehydrating the 1,3,3,3-tetrafluoropropene by the above dehydration process, and a fourth step for purifying the 1,3,3,3-tetrafluoropropene by distillation.
摘要:
Disclosed is a method for producing 3,3,3-trifluoropropyne, which is characterized in that a (Z)-1-halogeno-3,3,3-trifluoropropene represented by the formula [1] is reacted with a base. This method enables to produce 3,3,3-trifluoropropyne with high yield. Since waste disposal is easy in this method, this production method is commercially advantageous.