MONOLITHIC FLUID SENSOR SYSTEM AND METHOD FOR MANUFACTURING THE MONOLITHIC FLUID SENSOR SYSTEM

    公开(公告)号:EP4227667A1

    公开(公告)日:2023-08-16

    申请号:EP22156164.0

    申请日:2022-02-10

    摘要: According to an embodiment, a monolithic fluid sensor system (100) comprises a sensor arrangement (110) having a thermal radiation emitter (111), an optical filter structure (112), a waveguide structure (113) and a thermal radiation detector (114) on a first main surface region of a sensor substrate (115), a cover substrate (120), wherein a recess (122) is arranged in a first main surface region of the cover substrate (120) and a through-opening (126) is arranged between the recess (122) in the first main surface region and a second main surface region of the cover substrate (120), wherein the first main surface region of the cover substrate (120) is bonded to the first main surface region of a sensor substrate (115; 105), and wherein the sensor arrangement (110) is arranged below the recess (122) of the cover substrate (120), a reference sensor arrangement (130) having a reference thermal radiation emitter (131), a reference optical filter structure (132), a reference waveguide structure (133) and a reference thermal radiation detector (134) on a first main surface region of a reference sensor substrate (135), and a reference cover substrate (140), wherein a reference recess (142) is arranged in a first main surface region of the reference cover substrate (140), wherein the first main surface region of the reference cover substrate (140) is bonded to the first main surface region of the reference sensor substrate (135), and wherein the reference recess (142) in the first main surface region of the reference cover substrate (140) forms a hermetically closed cavity (144) for the reference sensor arrangement (130).

    METHOD AND APPARATUS FOR RAPID SEQUENTIAL FLOW INJECTION

    公开(公告)号:EP4220184A1

    公开(公告)日:2023-08-02

    申请号:EP23163996.4

    申请日:2015-08-13

    摘要: A process for making fluid delivery is provided that is useful in flow-injection based sensing measurements, wherein samples from a sample rack are introduced into a flow cell (104) where sensing measurements are taken. The process utilizes at least two holding lines (211, 221) where each holding line can retain one of the samples prior to injection of the thus retained sample into a flow cell. The introduction of the samples from the sample racks to the holding lines is alternated and the injection of the samples from the holding lines to the flow cell are alternated so that one holding line is loaded with one of the samples simultaneously with another sample being injected from the another holding line to the flow cell.