摘要:
An optical interference apparatus includes a light source, a beam splitter for splitting a light beam from said light source, a reference surface by which one split light beam from said beam splitter is reflected to propagate backward through the optical path, the light beam from said reference surface and the other split light beam which emerges from said beam splitter, is reflected by an object to be detected, and returns, being combined by said beam splitter and the combined light being finally used as interference light, and the two split light beams emerging from said beam splitter as convergent light, and an optical element having a function of converging a light beam or changing a divergent state of the light beam, said optical element being inserted in an optical path of one of the split light beams emerging from said beam splitter, and the reflected light beams from converging at said beam splitter positions of the two split light beams being combined as spherical waves with curvatures equal to each other owing to an effect of said optical element.
摘要:
An optical type encoder includes a light-emitting element, a scale, a light receiving element for detecting light from the scale when a light beam from the light-emitting element is projected onto the scale, an incremental signal resulting from displacement of the scale being obtained by detection by the light receiving element, two or more mark portions for producing an origin signal formed on the scale, and an origin detecting system for detecting the mark portions for producing the origin signal. The rising position or the falling position of at least one pulse signal indicative of the origin is determined by the detection signals of the two or more mark portions for producing the origin signal by the origin detecting system.