公开(公告)号：EP0907410A1

公开(公告)日：1999-04-14

申请号：EP98903934.0

申请日：1998-02-06

申请人： Nanogram Corporation

发明人： BI, Xiangxin ,  KAMBE, Nobuyuki

IPC分类号： B01J12 ,  B01J19 ,  C01B31 ,  C09C1

CPC分类号： B82Y30/00 ,  B01J12/005 ,  B01J12/02 ,  B01J19/08 ,  B01J19/121 ,  C01B32/914 ,  C01P2004/64 ,  C09C1/48 ,  Y10S266/905 ,  Y10S977/773 ,  Y10S977/835 ,  Y10S977/838 ,  Y10S977/84

摘要： An apparatus produces particles, preferably nanoparticles, from gas phase chemical reactions induced by a radiation beam. The radiation beam comprises preferably electromagnetic radiation or a laser beam. The apparatus includes a reaction chamber (102) with a window (242) for introducing the radiation and an elongated reactant inlet (164), and said reaction chamber is configured to conform generally to the elongated shape of the reactant inlet. Shielding gas may be introduced (196) to form a blanket of inert gas on both sides of the reactant stream to prevent reactive gases and product particles striking the chamber walls and the optical components. The apparatus may further comprise a pyrometer (302) to monitor the emission of reactants, a particle size analyser (400) and a computer (108). A feedback loop with a pressure sensor (30 4) may be used to maintain the desired pressure within the reaction chamber.