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5370 条记录 (耗时 0.022 秒)

    TEST APPARATUS
    24.
    发明公开
    TEST APPARATUS 审中-实审

    公开(公告)号：EP4379403A1

    公开(公告)日：2024-06-05

    申请号：EP22847792.3

    申请日：2022-01-20

    申请人： HANGZHOU CHANGCHUAN TECHNOLOGY CO., LTD.

    发明人： LIANG, Yuquan ,  ZHANG, Qijie ,  QIU, Guozhi

    IPC分类号： G01R31/28

    摘要： A test apparatus, which is configured for testing an electronic element, and includes a test table (10) and a circuit board (20). The circuit board (20) is electrically connected to the test table (10); the test table (10) is provided with an air-intake hole (14), an air-out hole (15) and a gas flow channel (16); and the gas flow channel (16) is connected to and in communication with the air-intake hole (14) and the air-out hole (15), respectively, so that gas is capable of entering the gas flow channel (16) from the air-intake hole (14), flowing out from the air-out hole (15), and coming into contact with the circuit board (20) so as to control a temperature of the circuit board (20) to be within a range of -10 °C to 100 °C.

    APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES
    28.
    发明公开
    APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES 审中-实审

    公开(公告)号：EP4354162A2

    公开(公告)日：2024-04-17

    申请号：EP24160048.5

    申请日：2015-12-04

    申请人： Kla-Tencor Corporation

    发明人： MARIVOET, Tom ,  TRUYENS, Carl ,  WOUTERS, Christophe

    IPC分类号： G01R31/28

    CPC分类号： G01N21/95 ,  G01N21/8806 ,  G01N21/9505 ,  G01N21/95684 ,  G01R31/01

    摘要： An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.