Temperature control in which the control parameter is the degree of imperfection in the impedance matching
    22.
    发明公开
    Temperature control in which the control parameter is the degree of imperfection in the impedance matching 失效
    温度控制,其中阻抗失配程度的控制参数是。

    公开(公告)号:EP0274836A1

    公开(公告)日:1988-07-20

    申请号:EP87310340.2

    申请日:1987-11-24

    申请人: METCAL INC.

    IPC分类号: G05D23/26 H05B6/06

    CPC分类号: G05D23/26 G05D23/1906

    摘要: A radio frequency heating current to heat the load of a heater (15) whose impedance varies substantially with temperature. The change in impedance of the load (15) changes the degree of mismatch between the power transmission system (10, 11, 12) and the load (15) resulting in a change in the voltage which is reflected back to the power transmission system (10, 11, 12) by the load (15).
    The reflected voltage is sensed (13) and its magnitude is compared to the voltage of a reference source (22). The difference between the reference source and the reflected voltage is used to turn off the power to the load when the reflected voltage (V r ) exceeds the reference voltage (AV r ). The load temperature then drops and the power to the load is restored after a selected predetermined time.
    A directional coupler (13) may be employed to isolate the reflected voltage. The isolated reflected voltage (KV r ) is compared with a reference voltage, to produce a difference signal. The power supply is turned on and off depending on the magnitude of the difference signal, thereby producing a pulsating current that holds the load temperature constant.

    摘要翻译: 一种射频加热电流来加热的加热器(15),其阻抗随温度变化很大的负荷。 在负载(15)的阻抗的变化而变化,其被反射回的电力传送系统的不匹配的动力传递系统(10,11,12)和所述负荷(15)的变化引起的程度(在电压全部 10,11,12)由所述负载(15)。 反射电压被感测到(13)和它的幅度与参考源(22)的电压。 参考源和反射电压之间的差被用于关闭电源到负载当反射电压(VR)超过基准电压(AVR)。 然后,负载的温度下降和功率到负载的选择的预定时间之后恢复。 的定向耦合器(13)可以被用于分离反射电压。 的分离的反射电压(KVR)与一个参考电压比较,以产生一个差信号。 电源被接通和关断取决于差分信号的幅度,从而产生脉动电流那样保持住装入温度恒定。