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86 条记录 (耗时 0.019 秒)

    Device and method for holographic reflection imaging
    32.
    发明授权
    Device and method for holographic reflection imaging 有权

    公开(公告)号：EP2657793B1

    公开(公告)日：2017-10-18

    申请号：EP12165342.2

    申请日：2012-04-24

    申请人： IMEC

    发明人： Huys, Roeland ,  Stahl, Richard ,  Vanmeerbeeck, Geert ,  Peumans, Peter

    IPC分类号： G03H1/04 ,  G03H1/02 ,  G03H1/00

    CPC分类号： G03H1/26 ,  G03H1/0402 ,  G03H1/0443 ,  G03H1/0465 ,  G03H2001/005 ,  G03H2001/0212 ,  G03H2001/0447 ,  G03H2222/34 ,  G03H2226/11

    摘要： A holographic imaging device (100) for imaging an object under study (104) comprises: a partially reflective surface (103) having a contact side (131) for contacting the object under study (104) and an imaging side (132) for partially reflecting a radiation wave (107), at least one radiation source (102) for projecting said radiation wave (107) onto said imaging side (132) of the partially reflective surface (103), and an image sensor (101) arranged to receive said radiation wave (107) when reflected by said partially reflective surface (103). The image sensor (101) is adapted for determining an interference pattern between said radiation wave (107) reflected by said imaging side (132) of the partially reflective surface (103) and said radiation wave (107) reflected by the object under study (104) when contacting said contact side (131) of the partially reflective surface (103).

    EXPOSURE DEVICE, AND PRODUCTION METHOD FOR STRUCTURE
    34.
    发明公开
    EXPOSURE DEVICE, AND PRODUCTION METHOD FOR STRUCTURE 有权
    BELICHTUNGSVORRICHTUNG UND HERSTELLUNGSVERFAHRENFÜREINE STRUKTUR

    公开(公告)号：EP2790206A1

    公开(公告)日：2014-10-15

    申请号：EP12855433.4

    申请日：2012-12-05

    申请人： Hitachi High-Technologies Corporation

    发明人： NAKAI Naoya ,  EBATA Yoshisada

    IPC分类号： H01L21/027 ,  G01B11/00 ,  G02B5/18 ,  G03F7/20

    CPC分类号： G03F7/70408 ,  G02B27/60 ,  G03F7/7085 ,  G03H1/0402 ,  G03H1/0486 ,  G03H1/28 ,  G03H2001/0413

    摘要： In order to exposure interference fringes to photoresist and form a desired irregular pattern, it is necessary to know the cycle of the interference fringes in advance. In order to confirm the cycle of the interference fringes beforehand, it is necessary in conventional techniques to observe the formed irregular pattern with the use of a microscope or measure a diffraction angle of incident light and repeat processes of exposure, development, and observation (measurement) while slightly changing incident angles of light fluxes for the formation of the interference fringes until a desired cycle is confirmed. These operations take considerable amount of time. The fact that it takes considerable amount of time to confirm the interference fringes has not been considered in the conventional techniques. Observation of a moire generated by a standard sample containing a fluorescent sample that can be repeatedly used and adjustment of the cycle of interference fringes reduce time for the adjustment.

    摘要翻译： 为了曝光干涉条纹到光致抗蚀剂并形成所需的不规则图案，有必要事先知道干涉条纹的周期。 为了预先确认干涉条纹的周期，在常规技术中，必须使用显微镜观察形成的不规则图案或测量入射光的衍射角以及重复曝光，显影和观察（测量）的过程 ），同时稍微改变用于形成干涉条纹的光通量的入射角，直到确定期望的周期。 这些操作需要相当长的时间。 在传统技术中没有考虑到需要大量时间来确认干涉条纹的事实。 观察由含有可重复使用的荧光样品的标准样品产生的莫尔条纹和干涉条纹周期的调整可以减少调整时间。

    HOLOGRAM RECORDING DEVICE
    36.
    发明公开
    HOLOGRAM RECORDING DEVICE 审中-公开
    全息记录装置

    公开(公告)号：EP1843223A4

    公开(公告)日：2009-07-29

    申请号：EP05704179

    申请日：2005-01-27

    申请人： FUJITSU LTD

    发明人： YOSHIKAWA HIROYASU ,  TEZUKA KOUICHI ,  UNO KAZUSHI

    IPC分类号： G03H1/04 ,  G11B7/0065 ,  G11B7/135 ,  G11C13/04

    CPC分类号： G03H1/0404 ,  G03H1/0402 ,  G03H2001/0415 ,  G03H2223/13 ,  G03H2223/17 ,  G03H2225/24 ,  G03H2250/42 ,  G11B7/0065 ,  G11B7/1395 ,  G11C13/042

    摘要： A hologram recording device (A1) comprises a light source (1) emitting a coherent light beam and a spatial optical modulator (5A) for modulating a first part of the light beam from the light source (1) to a recording light having two-dimensional information. A second part of the light beam is used as a reference light interfering with the recording light, and the recording light and the reference light are directed to a hologram recording medium (B). Between the light source (1) and the spatial optical modulator (5A), a semitransparent optical element (4) for directing the first part of the light beam to the spatial optical modulator (5A)) as a transmitted light and directing the second part of the light beam to the hologram recording medium (B) as a reflected light is disposed. The recording light and the reference light are separated into a transmitted light and a reflected light by the optical element (4), respectively. The transmitted light and the reflected light pass along the same optical path (L) and are applied to the hologram recording medium (B).

    HOLOGRAM RECORDING DEVICE
    37.
    发明公开
    HOLOGRAM RECORDING DEVICE 审中-公开
    全息AUFZEICHNUNGSEINRICHTUNG

    公开(公告)号：EP1843223A1

    公开(公告)日：2007-10-10

    申请号：EP05704179.0

    申请日：2005-01-27

    申请人： FUJITSU LIMITED

    发明人： YOSHIKAWA, Hiroyasu c/o FUJITSU LIMITED ,  TEZUKA, Kouichi c/o FUJITSU LIMITED ,  UNO, Kazushi c/o FUJITSU LIMITED

    IPC分类号： G03H1/04 ,  G11B7/0065 ,  G11B7/135 ,  G11C13/04

    CPC分类号： G03H1/0404 ,  G03H1/0402 ,  G03H2001/0415 ,  G03H2223/13 ,  G03H2223/17 ,  G03H2225/24 ,  G03H2250/42 ,  G11B7/0065 ,  G11B7/1395 ,  G11C13/042

    摘要： A hologram recorder A1 includes a light source (1) of a coherent light beam and a spatial light modulator (5A) for modulating a part of the light beam from the light source (1) into a recording beam which carries two-dimensional information. Another part of the light beam is used as a reference beam to interfere with the recording beam. The recording beam and the reference beam are directed to a hologram recording medium (B). A semi-translucent optical device (4) is disposed between the light source (1) and the spatial light modulator (5A) for letting a part of the beam travel to the spatial light modulator (5A) as a transmitted beam while letting another part of the beam travel to the hologram recording medium (B) as a reflected beam. The recording beam and the reference beam, after being separated from each other by the optical device (4) as the transmitted beam and the reflected beam, travel along the same optical path (L) to irradiate the hologram recording medium (B).

    摘要翻译： 全息图记录器A1包括相干光束的光源（1）和用于将来自光源（1）的光束的一部分调制成携带二维信息的记录光束的空间光调制器（5A）。 光束的另一部分被用作参考光束以干扰记录光束。 记录光束和参考光束被引导到全息记录介质（B）。 半透光性光学器件（4）设置在光源（1）和空间光调制器（5A）之间，用于使一部分光束作为透射光束行进到空间光调制器（5A），同时让另一部分 光束作为反射光束行进到全息图记录介质（B）。 记录光束和参考光束在作为透射光束和反射光束的光学装置（4）彼此分离之后，沿着相同的光路（L）行进以照射全息图记录介质（B）。

    Holographic ROM system
    38.
    发明公开
    Holographic ROM system 有权
    全息ROM系统

    公开(公告)号：EP1473713A3

    公开(公告)日：2007-01-24

    申请号：EP03022935.5

    申请日：2003-10-09

    申请人： Daewoo Electronics Corporation

    发明人： Roh, Jae-Woo

    IPC分类号： G11B7/0065

    CPC分类号： G11B7/1353 ,  G03H1/02 ,  G03H1/0402 ,  G03H1/265 ,  G03H2001/0216 ,  G03H2001/0415 ,  G11B7/0065 ,  G11B7/1362

    摘要： A holographic ROM system includes a light source (200) for emitting a laser beam; an expanding unit (204) for expanding the laser beam; and a mask (206) for modulating a certain portion of the expanded laser beam to thereby generate a signal beam which is directly provided to a holographic medium (208) and sifting the remainder portion of the expanded laser beam to thereby generate a reference beam which is provided to a conical mirror (210) reflecting the reference beam toward the holographic medium. The holographic medium is composed of a recording region onto which both the reference beam and the signal beam are projected; and a transparent region which passes through the reference beam sifted by the mask, to thereby provide the reference beam to the conical mirror.

    Holographic data recording apparatus and method
    39.
    发明公开
    Holographic data recording apparatus and method 有权
    全息数据存储的装置和方法

    公开(公告)号：EP1605443A2

    公开(公告)日：2005-12-14

    申请号：EP05000490.2

    申请日：2005-01-12

    申请人： Daewoo Electronics Corporation

    发明人： Moon, Jin Bae

    IPC分类号： G11B7/0065

    CPC分类号： G11B7/1398 ,  G03H1/0402 ,  G03H2001/0415 ,  G11B7/0065 ,  G11B7/1362 ,  Y10S359/90

    摘要： A holographic data recording apparatus includes: a signal beam patterning unit (48) for irradiating a signal beam onto a holographic medium (50), the signal beam including a data pattern to be recorded; a cylindrical optical body (102) including a cylindrical reflective surface, by which a first and a second reference beams alternatively incident thereto at incident angles are reflected toward the holographic medium, alternatively; and an incident angle control unit for controlling the incident angles of the first and the second reference beams incident on the cylindrical optical body, wherein the data pattern is recorded on the holographic medium by interfering the signal beam with the first and the second reference beams on the holographic medium. The holographic data recording apparatus do not require the replacement of the conventional conical mirrors while recording a plurality of data on a holographic medium, thereby increasing the recording speed and reducing the manufacturing cost thereof.