公开(公告)号：EP2452349A1

公开(公告)日：2012-05-16

申请号：EP10727435.9

申请日：2010-07-01

申请人： IMEC ,  Stichting IMEC Nederland ,  Katholieke Universiteit Leuven K.U. Leuven R&D

发明人： STERKEN, Tom ,  ALTENA, Geert ,  GOEDBLOED, Martijn ,  PUERS, Robert

IPC分类号： H01G5/14 ,  B81B3/00

CPC分类号： H01G5/011 ,  H01G5/18

摘要： A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate (40) comprising a first layer (41), a second layer (42), and a third layer (43) stacked on top of one another; and etching a plurality of first trenches (70) through the third layer (43), through the second layer (42), and into the first layer (41) using a single etching mask. Etching the plurality of first trenches (70) defines a plurality of first fingers (51) in the third layer (43) and a plurality of second fingers (52) in the first layer (41). By using a single mask, the process is self-aligned. The method further comprises removing the second layer (42) in a first region where the plurality of first trenches (70) are provided, thereby forming a spacing or gap between the plurality of first fingers (51) and the plurality of second fingers (52).

公开(公告)号：EP2271904A1

公开(公告)日：2011-01-12

申请号：EP09735586.1

申请日：2009-03-10

申请人： Custom Sensors & Technologies, Inc.

发明人： CASEY, Gary, L. ,  NASSAR, Marcos ,  NGUYEN, Nhan

IPC分类号： G01L9/12

CPC分类号： G01L9/0075 ,  H01G5/011 ,  H01G5/014 ,  H01G5/18 ,  Y10T29/43

摘要： Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity.

公开(公告)号：EP2100315A1

公开(公告)日：2009-09-16

申请号：EP07849281.6

申请日：2007-11-29

申请人： Koninklijke Philips Electronics N.V.

发明人： NIESSEN, Rogier A. H. ,  NOTTEN, Petrus H. L. ,  OP HET VELD, Johannes H. G. ,  PIJNENBURG, Remco H. W.

IPC分类号： H01G5/011 ,  H01M10/00 ,  H01G9/155

CPC分类号： H01G5/011 ,  H01M10/00 ,  H01M10/0436 ,  H01M12/005

摘要： The present invention relates to a solid-state variable capacitor, comprising a first capacitor plate (10), a second capacitor plate (12), extending substantially parallel to the first capacitor plate (10) and on a distance from said first capacitor plate, wherein at least the first capacitor plate (10) is structurally coupled to one side of a first layered solid-state battery wherein the layers (4-8) of said first solid-state battery (3) extend substantially parallel to the first capacitor plate (10) and wherein the first solid-state battery is susceptible to variations in the size in the direction perpendicular to the plane of its layers (4-8). This invention is based on the realization that the thickness of a solid-state battery (3) varies with condit ions prevailing in the battery. The movable capacitor plate (10) causes a change of the capacitance value of the capacitor.

公开(公告)号：EP0931326B1

公开(公告)日：2000-05-17

申请号：EP97918903.2

申请日：1997-08-25

申请人： EPCOS AG

发明人： VETTER, Harald ,  BERG, Ludwig

IPC分类号： H01G4/236

CPC分类号： H01G5/011 ,  H01G5/014 ,  Y10T29/435 ,  Y10T29/49169 ,  Y10T29/49194

摘要： According to the suggested method for manufacturing a low self-inductance capacitor integrated in a casing, the wiring between the capacitor (1) junction elements and the passages are made with flexible leads (2) preferably of substantially circular section, the periphery of which shall be tightened prior to their insertion through the passages (6), at least at one end situated in said passages (6).