SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR
    84.
    发明公开
    SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR 失效
    MIKROSTRUKTARIERTER摄谱仪FOR USE AS传感器,气体探测器

    公开(公告)号:EP0745268A1

    公开(公告)日:1996-12-04

    申请号:EP95903590.0

    申请日:1994-11-22

    CPC classification number: H01J49/288 H01J49/0018

    Abstract: A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

    Microelectronic Field Ionizer and Method of Fabricating the Same
    85.
    发明公开
    Microelectronic Field Ionizer and Method of Fabricating the Same 失效
    Nach der Mikroelektronik aufgebauter Feldionisator und Verfahren zur Herstellung desselben。

    公开(公告)号:EP0346271A1

    公开(公告)日:1989-12-13

    申请号:EP89730139.6

    申请日:1989-06-07

    Abstract: A microelectronic field ionizer and alternate fabrication procedures for the same are described. The field ionizer has an array of small diameter gas outlets in the form of microvolcanos. A counter­electrode layer of material is provided on the micro­electronic substrate, in registration with the gas outlets.

    Abstract translation: 描述了一种微电子场电离器及其替代制造方法。 场电离器具有微小火焰形式的小直径气体出口阵列。 在微电子基板上设置反电极层材料,与气体出口对准。

    Micro-nebulizer for analytical instruments
    86.
    发明公开
    Micro-nebulizer for analytical instruments 失效
    用于分析仪器的微型NEBULIZER

    公开(公告)号:EP0265617A3

    公开(公告)日:1989-07-19

    申请号:EP87112173.7

    申请日:1987-08-21

    CPC classification number: H01J49/0018 B05B7/0483 G01N30/7246 H01J49/045

    Abstract: A nebulizer assembly (10) particularly well adapted as a liquid chromatograph/mass spectrometer (LC/MS) interface including a pair of nebulizer plates (12,14), a base (16), and a cap (18) for tightly holding the nebulizer plates (12,14) against the base (16). A first nebulizer plate (12) has a centrally located outlet orifice (22) and a radially extending groove (24), and the second plate (14) has a centrally located gas inlet orifice (32) and a radially displaced liquid inlet orifice (34). The gas inlet orifice (32) aligns with the outlet orifice (22) and an aperture (20) provided in the cap (18), and the liquid inlet orifice (34) aligns with a section of the groove (24) provided in the first nebulizer plate (12). When the gas inlet orifice (32) is coupled to a pressurized gas source and the liquid inlet orifice (34) is coupled to a pressurized liquid source, uniform droplets (74) having a diameter of approximately 10 microns can be formed from an outlet orifice (22) twice that diameter.

    MICROENGINEERED SKIMMER CONE FOR A MINIATURE MASS SPECTROMETER

    公开(公告)号:EP3329508A1

    公开(公告)日:2018-06-06

    申请号:EP16738441.1

    申请日:2016-07-13

    Inventor: SYMS, Richard

    CPC classification number: H01J49/067 H01J49/0018

    Abstract: A method for forming a miniature skimmer cone for a free jet expansion vacuum interface is disclosed. The skimmer cone is formed from electroplated metal, deposited inside a blind hole formed on a silicon substrate. The substrate is partially removed to expose the skimmer cone, together with other features formed by etching, and an outlet orifice is formed. A complete miniature vacuum interface is formed from the stacked assembly of a part containing an inlet orifice, a spacer, and the part containing a skimmer cone described above, mounted in an intermediate pressure chamber at the inlet to a mass spectrometer.

    ION TRAP SYSTEM
    90.
    发明授权
    ION TRAP SYSTEM 有权
    离子阱系统

    公开(公告)号:EP3088354B1

    公开(公告)日:2017-11-08

    申请号:EP16156215.2

    申请日:2016-02-17

    Inventor: YOUNGNER, Daniel

    Abstract: Apparatuses, systems, and methods for ion traps are described herein. One apparatus includes a number of microwave (MW) rails (110) and a number of radio frequency (RF) rails (108) formed with substantially parallel longitudinal axes and with substantially coplanar upper surfaces. The apparatus includes two sequences of direct current (DC) electrodes (106) with each sequence formed to extend substantially parallel to the substantially parallel longitudinal axes of the MW rails (110) and the RF rails (108). The apparatus further includes a number of through-silicon vias (TSVs) (115) formed through a substrate (105) of the ion trap (100) to provide an electrical potential to DC electrodes (106) and a trench capacitor (116) formed in the substrate (105) around at least one TSV (115).

Patent Agency Ranking