RETICLE COMPACT BOX OPENER
    5.
    发明公开

    公开(公告)号:EP4379465A2

    公开(公告)日:2024-06-05

    申请号:EP23213103.7

    申请日:2023-11-29

    申请人: Jabil, Inc.

    发明人: Bosboom, Jeroen

    IPC分类号: G03F1/66

    摘要: An apparatus, system and method for a compact box opener suitable for opening a compact box containing therein a reticle. The embodiments provide: a flowthrough deck; a plurality of location guides on the flowthrough deck suitable to mate with guides on a base of the compact box; a plurality of vacuum ports on the plurality of location guides capable of retaining the guides on the base; a lid opening arm having a suction cup at an end thereof, wherein the suction cup is capable of gripping a lid of the compact box and opening the lid by an actuation of the lid opening arm; rotary-actuated arms that are raised for initial actuation within the drawer above a rim of the compact box and which, when actuated, rotate jaws at an end of each of the rotary-actuated arms inward over the rim and downward to a height below a lower plane of the reticle; and at least one angular notch in each of the jaws suitable to grip a radiused edge of the reticle. Once the radiused edge of the reticle is gripped by the inward movement of the jaws, the jaws are raised while the reticle remains gripped until the reticle is at a second height fully above the rim.

    APPARATUS, SYSTEM AND METHOD FOR A LAMINATION PRESS

    公开(公告)号:EP4324648A3

    公开(公告)日:2024-05-15

    申请号:EP23218187.5

    申请日:2019-12-04

    申请人: Jabil Inc.

    IPC分类号: B32B38/18 B32B37/10

    摘要: A lamination apparatus, system, and method. The apparatus, system and method are for a lamination press for laminating at least one laminating film to a subject, which may include: an upper press comprising a gel plate, an upper vacuum chamber, and tooling suitable to apply the laminating film; a lower press suitable to maintain the subject to receive the laminating film, and comprising a lower vacuum chamber, an air bearing stage, and servo-positioned tooling; and an aligner that applies the servo-positioned tooling to maintain positional balance and alignment of the subject by the air bearing stage during the laminating while enabling vertical flexure of the lower press, wherein the positional balance and alignment is substantially continuously monitored by a controller.