摘要:
To provide a substrate storage container capable of keeping low a relative humidity in an internal closed space for a long period of time even after purging, a substrate storage container 1 comprises a constitutive material, which includes a shell body 2, a door 4 and an on-off valve 8, defining the internal closed space 3, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt.% or less when immersed in water at 23 degree C for 24 hours, and thereby, an actual requirement is objectively satisfied in terms of water release suppression ability under JIS K 7209 or ISO 62 to significantly suppress releasing of water into the internal closed space 3 through the shell body 2, the door 4 and the on-off valve 8.
摘要:
To provide a door structure and a substrate storage container with which there is less fear that even when the door is manually opened and closed, its parts, accessories and the like are lost, with which particles are unlikely to arise due to vibration, impacts and the like during transportation and with which it does not take long time to dry after washing. A container body 1 for accommodating substrates and a door structure 10 to be detachably fitted into an open front portion 2 of this container body 1 are provided. Door structure 10 is constructed of a casing detachably fitted into open front portion 2 of container body 1, a locking mechanism 14 disposed on the front side of the casing for locking the casing by projecting an engaging claw from the peripheral wall of the casing in a retractable manner as rotary plate 15 is turned so that the claw engages the inner periphery of open front portion 2 of container body 1, a cover plate 22 attached on the front side of the casing to cover the locking mechanism, and operational windows 30 which are formed in cover plate 22 so as to partially oppose rotary plate 15. A manual operating means is provided for rotary plate 15 of locking mechanism 14 at the position opposing operational window 30.
摘要:
A damping body for packaging and a package body which can efficiently absorb impacts at the time of falling are provided. Between an abutment 25 adapted to abut against a precision substrate storage container 3 upon packaging and an outer peripheral wall 22 rising from an outer peripheral edge of a bottom part 21 having the abutment 25, an outer peripheral bottom 26 is formed at a position distanced more from the abutment 25 than is the precision substrate storage container 3, and a stepped part 27 is formed between the outer peripheral bottom 26 and the abutment 25. Consequently, in the event of an impact from the outside, the stepped part 27 collapses, so that the abutment 25 favorably moves with respect to the outer peripheral bottom 26 and thus can efficiently absorb the impact. This can prevent large impacts from instantaneously being exerted on the precision substrate storage container 3 and efficiently damp drop impacts.
摘要:
A key frame capable of being easily fitted into a product and that can be prevented from deforming in the fitting. Elastic projections (41p) elastically projecting outward are provided at the lower side and both lateral sides of a hard base (41). The elastic projections (41p) function as fixing members when a cover member for a push button switch is fitted into a housing of the product. Inside an elastic projection (41p) is provided a space (S). When the elastic projection (41p) is pressed from the outside, the space (S) enables the inwardly deformed elastic projection (41p) to enter into the space (S). As a result, the elastic projections (41p) projecting from an outer peripheral line of the hard base (41) can be elastically deformed so as to retract inside the hard base (41).
摘要:
A substrate storage container enabling the proper positioning thereof even when the container is mounted on an apparatus with the cover body side of a container body tilted downward to prevent troubles from occurring in operations after thereafter and a method of positioning the container. The container comprises the container body (1) in which a plurality of precise substrates are orderly stored, the cover body opening/closing the opened front face of the container body (1), and a plurality of positioning bodies (40) orderly installed at the bottom part of the container body (1). Each positioning body (40) is formed in a recessed part of a pair of parallel ribs (2) formed on the bottom face of the container body (1) and the inner surface (9) of the curved part (8) of a track (6) formed on a bottom plate (4). The inner surface (9) of the track (6) is tilted from the upper side to the lower side to be gradually diverged linearly, and the upper end parts of the inner surface (9) are formed by extending to opposed areas (2a) positioned in the clearances thereof from the lower end parts of the pair of parallel ribs (2).
摘要:
A substrate-storing container capable of preventing a substrate and a clean environment for processing the substrate from being contaminated because of production of wear powder. A substrate-storing container has a front opening box-type container main body for storing plural substrates in an orderly manner, a cover body for opening and closing in a sealable manner an opened front face of the container main body, and an inner pressure-adjusting mechanisms fitted in the container main body and in an installation portion for the cover body, and for adjusting inner pressure of the container main body closed by the cover body. The inner pressure-adjusting mechanisms each structured of an elastic installation tube, a filter holder fitted and protected in the installation tube, and plural filters held in the filter holder. Installation holes are provided in the container main body and the cover body, so that the inner pressure adjusting-mechanisms can be installed only by installing the installation tubes, with a simple construction, in the installation holes with the tubes deformed elastically. Therefore, screw holes that are complex to process are not required, and the construction of a die for forming the container main body does not become complex.
摘要:
A connector comprises an insulating holder (10) which is partly fitted to an outer peripheral part (1) of the back side of an electro−acoustic component (1), and a conductive connection piece (20) which is extended through and supported by the holder (10) and pressed against an electrode of the electro−acoustic component (1). The holder (10) is formed in a generally U−shaped section which is so fitted to an electrode part (2) of the electro−acoustic component (1) as to cover the component (1), and a pocket hole (11) is made in the holder (10). The conductive connection piece (20) comprises an insulating elastic resin body (21) fitted in the pocket hole (11) in the holder (10) and a plurality of metal thin wires (22) which are arrayed at predetermined pitches and buried in the internal height direction of the elastic resin body (21) to electrically connect the electrodes of the electro−acoustic component (1) and a circuit board (30).