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    SILICON NANOWIRE CHIP AND SILICON NANOWIRE CHIP-BASED MASS SPECTRUM DETECTION METHOD
    2.
    发明公开
    SILICON NANOWIRE CHIP AND SILICON NANOWIRE CHIP-BASED MASS SPECTRUM DETECTION METHOD 审中-公开

    公开(公告)号：EP3992142A1

    公开(公告)日：2022-05-04

    申请号：EP20832586.0

    申请日：2020-05-27

    Applicant: Hangzhou Well-Healthcare Technologies Co., Ltd.

    Inventor： WU, Jianmin ,  CHEN, Xiaoming

    IPC: B81B1/00 ,  B81B7/04 ,  B81C1/00 ,  G01N27/62

    Abstract: The present disclosure discloses a silicon nanowire chip and silicon nanowire chip-based mass spectrometry detection method. The detection method includes the following steps: step 1 of manufacturing a silicon nanowire chip, comprising: subjecting a monocrystalline silicon wafer to a surface washing pretreatment, a metal-assisted etching and a post-alkali etching to obtain a silicon nanowire chip with a tip, and performing a surface chemical modification or a nanomaterial modification on the silicon nanowire chip; step 2 of evaluating mass spectrometry performance of the silicon nanowire chip; and step 3 of performing a tip-contact sampling and in-situ ionization mass spectrometry detection. The present disclosure fully utilizes the nano-structure properties and semiconductor properties of the silicon nanowire chip to integrate contact-type extractive transfer and matrix-free mass spectrometry detection, the collection, pretreatment and detection processes of complex samples are thus greatly simplified. The manufactured silicon nanowire chip of the present disclosure is capable of having functions of adsorption, extraction and mass spectrometry detection simultaneously, and it also can retain in-situ information of samples with spatial heterogeneity.

    SYSTEME DE MESURE COMPRENANT UN RESEAU DE RESONATEURS DE TYPE NANO-SYSTEME ELECTROMECANIQUE
    8.
    发明公开
    SYSTEME DE MESURE COMPRENANT UN RESEAU DE RESONATEURS DE TYPE NANO-SYSTEME ELECTROMECANIQUE 有权
    具有纳米机电谐振器阵列测量系统

    公开(公告)号：EP2904384A1

    公开(公告)日：2015-08-12

    申请号：EP13774121.1

    申请日：2013-10-02

    Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives ,  Apix Analytics

    Inventor： ANDREUCCI, Philippe ,  BARATTIN, Régis ,  COLINET, Eric ,  DURAFFOURG, Laurent ,  PUGET, Pierre

    IPC: G01N30/64 ,  B81B7/04 ,  G01L1/18 ,  H03H3/007 ,  H03H9/02

    CPC classification number: G01N30/64 ,  G01N30/6095 ,  H03H9/02259 ,  H03H9/2457 ,  H03H2009/02496

    Abstract: The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and to determine the resonance frequency of a group of resonators which is selected by injecting, into said excitation signal, a frequency component corresponding to the empty resonance frequency of each selected group of resonators, and by identifying, in the output signal of the network, a resonance frequency component of the selected group of resonators.

    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING
    10.
    发明公开
    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING 审中-公开
    带杆结构的微电子机械开关，最小限度地损坏和施工过程

    公开(公告)号：EP2377138A4

    公开(公告)日：2014-04-16

    申请号：EP09837894

    申请日：2009-12-16

    Applicant: ANALOG DEVICES INC

    Inventor： ELLIS DENIS ,  FITZGERALD PADRAIG ,  WONG JO-EY ,  GOGGIN RAYMOND ,  ECKL RICHARD TARIK

    IPC: H01H59/00 ,  B81B7/04

    CPC classification number: H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    Abstract translation: 公开了一种微机电开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排水连接两端的长度。 该锚固件将开关结构耦合到基板，该锚具有一宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在接近铰链的区域中在基板和锚固件之间具有间隙。

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