Mems actuator
    59.
    发明专利
    Mems actuator 审中-公开
    MEMS执行器

    公开(公告)号:JP2011128173A

    公开(公告)日:2011-06-30

    申请号:JP2008105333

    申请日:2008-04-15

    CPC classification number: G02B26/085 H02K33/16 H02K33/18

    Abstract: PROBLEM TO BE SOLVED: To provide an MEMS actuator which can be reduced size at least in one direction and can perform two-dimensional scanning of laser light or the like. SOLUTION: The size of the MEMS actuator 1 viewing from the normal line direction of the first movable part 21 can be reduced by arranging second fixed parts 32, 33 which support a second movable part 31 which rocks around a second axis line Y wherein first fixed parts 22, 23 which support a first movable part 21 which rocks around a first axis line X, are laminated, inside the second movable part 31, or in linkage with a narrowed part 312A of the second movable part 31. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种可以至少在一个方向上减小尺寸并且可以执行激光等的二维扫描的MEMS致动器。 解决方案:可以通过布置第二固定部分32,33来减小从第一可移动部分21的法线方向观察的MEMS致动器1的尺寸,第二固定部分32,33支撑绕第二轴线Y围绕的第二可动部分31 其中支撑围绕第一轴线X围绕的第一可移动部分21的第一固定部分22,23在第二可动部分31的内部或与第二可移动部分31的变窄部分312A相连接。

    版权所有(C)2011,JPO&INPIT

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