公开(公告)号：US5785825A

公开(公告)日：1998-07-28

申请号：US538124

申请日：1995-10-02

申请人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

发明人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

IPC分类号： G11B5/72 ,  G11B5/84 ,  C23C14/34

CPC分类号： C23C14/0605 ,  G11B5/72 ,  G11B5/8408 ,  Y10S428/90 ,  Y10T428/30

摘要： A magnetic disc for use in a magnetic disc drive is provided. The magnetic disc includes a recording surface wherein the recording surface includes a dual phase carbon overcoat. The dual phase carbon overcoat includes an amorphous carbon film sputtered on a magnetic layer. A doped amorphous carbon film is sputtered on the amorphous carbon film. The dual phase carbon overcoat has demonstrated improved hardness, reduced stiction and superior corrosion resistance over the prior art. A method of manufacturing the magnetic disc is also provided. The method includes providing a sputtering apparatus having a process chamber, providing a partially manufactured magnetic disc having a magnetic layer thereon, placing the partially manufactured magnetic disc within the process chamber, sputtering an amorphous carbon film on the magnetic layer, and sputtering a doped amorphous carbon film on the amorphous carbon film. The process reduces throughput inefficiencies due to down time cleaning and avoids carbon induced damage to the discs.

摘要翻译： 提供用于磁盘驱动器的磁盘。 磁盘包括记录表面，其中记录表面包括双相碳外涂层。 双相碳外涂层包括溅射在磁性层上的无定形碳膜。 掺杂的非晶碳膜溅射在无定形碳膜上。 相比现有技术，双相碳外涂层具有改进的硬度，降低的粘结性和优异的耐腐蚀性。 还提供了制造磁盘的方法。 该方法包括提供具有处理室的溅射装置，提供其上具有磁性层的部分制造的磁盘，将部分制造的磁盘放置在处理室内，在磁性层上溅射无定形碳膜，并溅射掺杂的非晶体 碳膜在无定形碳膜上。 该过程由于停机时间清洁而降低了生产效率低下，并避免了碳导致的盘损坏。

公开(公告)号：US5945191A

公开(公告)日：1999-08-31

申请号：US879842

申请日：1997-06-20

申请人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

发明人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

IPC分类号： G11B5/72 ,  G11B5/84

CPC分类号： C23C14/0605 ,  G11B5/72 ,  G11B5/8408 ,  Y10S428/90 ,  Y10T428/30

摘要： A magnetic disc for use in a magnetic disc drive is provided. The magnetic disc includes a recording surface wherein the recording surface includes a dual phase carbon overcoat. The dual phase carbon overcoat includes an amorphous carbon film sputtered on a magnetic layer. A doped amorphous carbon film is sputtered on the amorphous carbon film. The dual phase carbon overcoat has demonstrated improved hardness, reduced stiction and superior corrosion resistance over the prior art. A method of manufacturing the magnetic disc is also provided. The method includes providing a sputtering apparatus having a process chamber, providing a partially manufactured magnetic disc having a magnetic layer thereon, placing the partially manufactured magnetic disc within the process chamber, sputtering an amorphous carbon film on the magnetic layer, and sputtering a doped amorphous carbon film on the amorphous carbon film. The process reduces throughput inefficiencies due to down time cleaning and avoids carbon induced damage to the discs.

摘要翻译： 提供用于磁盘驱动器的磁盘。 磁盘包括记录表面，其中记录表面包括双相碳外涂层。 双相碳外涂层包括溅射在磁性层上的无定形碳膜。 掺杂的非晶碳膜溅射在无定形碳膜上。 相比现有技术，双相碳外涂层具有改进的硬度，降低的粘结性和优异的耐腐蚀性。 还提供了制造磁盘的方法。 该方法包括提供具有处理室的溅射装置，提供其上具有磁性层的部分制造的磁盘，将部分制造的磁盘放置在处理室内，在磁性层上溅射无定形碳膜，并溅射掺杂的非晶体 碳膜在无定形碳膜上。 该过程由于停机时间清洁而降低了生产效率低下，并避免了碳导致的盘损坏。