公开(公告)号：US5468111A

公开(公告)日：1995-11-21

申请号：US121037

申请日：1993-09-13

Applicant: Alan Flint ,  Quy Nguyen ,  William G. Jacobs

Inventor： Alan Flint ,  Quy Nguyen ,  William G. Jacobs

IPC: B65G49/07 ,  G11B23/00 ,  B65G49/05

CPC classification number: G11B23/00 ,  Y10S414/121 ,  Y10S414/138 ,  Y10S414/139 ,  Y10S414/14 ,  Y10S414/141

Abstract: An assembly for transferring discs between disc manufacturing machinery or processes comprises a series of storage cassettes having discs stored therein. Each stored disc is retrieved from the cassette and placed into a shuttle which carries the disc while it is processed. The processed disc is retrieved from the shuttle subsequent to the disc manufacturing process and placed into a second storage cassette. The apparatus transfers the discs by gripping them between a stationary member which engages the edge of the disc and a selectably moveable member which engages the disc hole such that the disc is pinched between the two gripping members. The gripping and transferring functions are controlled by a computer.

Abstract translation: 用于在盘制造机械或工艺之间传送盘的组件包括一系列存储有盘的存储盒。 每个存储的盘从盒中取出并放置在在处理时携带盘的梭中。 处理的盘在盘制造过程之后从梭子中取出并放入第二存储盒中。 该装置通过将盘夹持在与盘的边缘接合的固定构件和与盘孔接合的可选择的可移动构件，从而将盘夹在两个夹持构件之间来传送。 夹持和传送功能由计算机控制。

公开(公告)号：US4749465A

公开(公告)日：1988-06-07

申请号：US826758

申请日：1986-02-06

Applicant: Alan Flint ,  Ken Miller ,  Sushil Shah

Inventor： Alan Flint ,  Ken Miller ,  Sushil Shah

IPC: C23C14/56 ,  H01L21/677 ,  C23C14/34 ,  B65G37/00

CPC classification number: H01L21/67712 ,  C23C14/568 ,  H01L21/6776 ,  Y10S414/139 ,  Y10S414/14

Abstract: A step-dwell transport apparatus and method for use in an in-line controlled environment processing system is disclosed. The transport apparatus employs a plurality of shuttles arranged in series along two parallel rails. Each shuttle carries one or more planar objects through a process chamber, which contains several in-line processing stations. One of the rails guides a queue of abutting shuttles through the process chamber, while the other rail serves as a return path for another queue of abutting shuttles. The shuttles move along each rail, with locomotion along the rail being provided by a pneumatic cylinder and linkage that periodically pushes forward the trailing shuttle in the queue. Transfer mechanisms are provided at each end of the apparatus to transfer individual shuttles from the end of one rail to the beginning of the other rail. Shuttles are supplied to and withdrawn from the process chamber one at a time through in-line air locks.

Abstract translation: 公开了一种用于在线受控环境处理系统中的步骤停留输送装置和方法。 运输装置采用沿两个平行轨道串联布置的多个梭子。 每个梭子通过处理室运送一个或多个平面物体，该处理室包含几个在线处理站。 其中一个轨道引导邻接的穿梭车队列通过处理室，而另一个轨道用作另一个邻接穿梭队列的返回路径。 梭子沿着每个轨道移动，沿着轨道的运动由气缸和连杆机构提供，周期性地推动队列中的拖车。 传送机构设置在设备的每个端部，以将单个梭子从一个轨道的端部传递到另一个轨道的开始处。 一次通过直列气闸将梭子一次提供给处理室并从处理室中取出。