公开(公告)号：US08652307B2

公开(公告)日：2014-02-18

申请号：US12460947

申请日：2009-07-27

申请人： Biing-Hwa Yan ,  Chh-Ping Cheng ,  Kun-Ling Wu ,  Yu-Shan Hsu

发明人： Biing-Hwa Yan ,  Chh-Ping Cheng ,  Kun-Ling Wu ,  Yu-Shan Hsu

IPC分类号： B23H7/38 ,  B23H5/02

CPC分类号： B23H7/38 ,  B23H3/00 ,  B23H5/06

摘要： In an apparatus and method for magnetic field assisted electrochemical discharge machining (ECDM), the magneto hydrodynamic (MHD) effect is utilized to improve the thickness of bubble film and the electrolyte circulation so as to enhance the machining accuracy and efficiency. Since charged ions in a magnetic field are induced by Lorenz force to move, and the electrolysis bubbles generated in the ECDM process are suffused with electrification ions on their surfaces, the electrolysis bubbles can be forced to move in the direction of the magnetic field without the need of mechanical disturbance. The present invention can be widely applied in the micro-machining of non-conductive brittle materials of different dimensions and shapes, comprising the forming of microchannels and microholes on a biochip, and in the micro-opto-electro-mechanical system (MOEMS) and various kinds of micro-machining fields. The machined surface is smooth and does not require a second time machining.

摘要翻译： 在用于磁场辅助电化学放电加工（ECDM）的设备和方法中，利用磁流体动力学（MHD）效应来提高气泡膜和电解质循环的厚度，从而提高加工精度和效率。 由于磁场中的带电离子是由洛伦茨力驱动的，所以在ECDM工艺中产生的电解气泡在其表面上充满了带电离子，电解气泡可以被迫沿磁场方向移动， 需要机械扰动。 本发明可广泛应用于不同尺寸和形状的非导电脆性材料的微加工，包括在生物芯片上形成微通道和微孔，以及在微光电机械系统（MOEMS）和 各种微加工领域。 加工表面光滑，不需要第二次加工。