公开(公告)号：US20240230990A1

公开(公告)日：2024-07-11

申请号：US18557444

申请日：2022-03-24

申请人： IHP GmbH-Innovations for High Performance Microelectronics/Leibniz-Instit. für innovative ,  Technische Hochschule Wildau

发明人： Patrick STEGLICH ,  Christian MAI ,  Andreas MAI ,  Francesco VILLASMUNTA ,  Claus VILLRINGER ,  Sigurd SCHRADER

IPC分类号： G02B6/122 ,  G02B6/12 ,  G02B6/136 ,  G02B6/43

CPC分类号： G02B6/122 ,  G02B6/136 ,  G02B6/43 ,  G02B2006/12121

摘要： An integrated optical waveguide formed in a substrate is disclosed. The integrated optical waveguide includes a hole, a core, and one or more bridges. The hole extends in an axial direction of the substrate. The core is made of the same material as the substrate, arranged in the hole, and extends in the axial direction. The core has a first refractive index and a sidewall which is at least partly surrounded by a surrounding material which has a second refractive index which is lower than the first refractive index and such that a refractive index difference between the first refractive index and the second refractive index allows to guide light within the core. The bridges extend from the sidewall of the core to a sidewall of the hole. The bridges may be made of the same material as the substrate. Furthermore, one or more of the sidewalls of the core, the hole, and the bridges may be tapered sidewalls which include a section which is oblique to the axial direction. Additionally an axial length of one or more of the bridges may be shorter than an axial length of the core.