Interferometric surface inspection using a slit-shaped reference beam from inspection surface
    2.
    发明授权
    Interferometric surface inspection using a slit-shaped reference beam from inspection surface 有权
    使用来自检查表面的狭缝状参考光束进行干涉测试

    公开(公告)号:US08643845B2

    公开(公告)日:2014-02-04

    申请号:US12926622

    申请日:2010-11-30

    IPC分类号: G01N21/00 G01B11/02

    摘要: Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

    摘要翻译: 提供了能够检测基板表面的异物的表面检查装置和方法,以及具有表面检查装置的狭缝涂布机。 在表面检查装置中,狭缝照明部照射狭缝状的光。 光学系统将狭缝状光分成沿着两个不同路径行进的两束光束,入射到被摄体上,并提取由对象反射的两束光的组合引起的干涉图像。 成像装置捕获干涉图像以输出图像信号。 分析单元获取图像信号的亮度值,实时分析亮度值,并确定是否存在异物。

    DELAMINATION APPARATUS AND INLINE THERMAL IMAGING SYSTEM
    3.
    发明申请
    DELAMINATION APPARATUS AND INLINE THERMAL IMAGING SYSTEM 有权
    分层装置和在线热成像系统

    公开(公告)号:US20140008022A1

    公开(公告)日:2014-01-09

    申请号:US13936298

    申请日:2013-07-08

    IPC分类号: B29C69/00

    摘要: A delamination apparatus that includes a stage to which a lower support, an acceptor substrate disposed on the lower support, and a donor film laminated with the lower support along the edge of the acceptor substrate, interposing the acceptor substrate therebetween are mounted. The delamination apparatus further includes a first gripper disposed in an end side of the stage to move an end of the donor film to a direction far away from the acceptor substrate by gripping the end of the donor film; and a first peeling roll disposed on the donor film to support the donor film disposed between the acceptor substrate and the first gripper, and rotating itself to a direction of the first gripper.

    摘要翻译: 一种分层装置,其包括下部支撑体,设置在下部支撑体上的受主基板和沿着受主基板的边缘与下部支撑体层叠的供体膜,在其间插入受体基板的阶段。 分层装置还包括设置在台架的端侧的第一夹持器,通过夹持施主膜的端部将施主膜的端部移动到远离受主基板的方向; 以及第一剥离辊,其设置在供体膜上以支撑设置在受主基板和第一夹持器之间的供体膜,并且将其自身旋转到第一夹持器的方向。

    Delamination Apparatus and Inline Thermal Imaging System
    5.
    发明申请
    Delamination Apparatus and Inline Thermal Imaging System 有权
    分层装置和在线热成像系统

    公开(公告)号:US20130133835A1

    公开(公告)日:2013-05-30

    申请号:US13486875

    申请日:2012-06-01

    IPC分类号: B32B37/06 B32B38/10

    摘要: A delamination apparatus includes a stage, a first roll unit, a gripper, and a second roll unit. The stage includes a peripheral area and a substrate area. An edge of a donor film is attached at the peripheral area. An acceptor substrate, laminated at on the donor film, is disposed at the substrate area. The first roll unit is disposed on the donor film, moves in a lengthwise direction of the acceptor substrate. The gripper is disposed on the donor film, and is configured to separate the edge of the donor film from the stage so as to cause the donor film to contact the first roll unit. The second roll unit is disposed on the stage, contacts the donor film which contacts the first roll unit, and delaminates the donor film from the acceptor substrate by moving in the lengthwise direction with the first roll unit.

    摘要翻译: 分层装置包括台,第一卷单元,夹具和第二卷单元。 舞台包括周边区域和衬底区域。 供体膜的边缘附着在周边区域。 层叠在供体膜上的受主衬底设置在衬底区域。 第一辊单元设置在供体膜上,在受主衬底的长度方向上移动。 夹持器设置在供体膜上,并且构造成将施体膜的边缘与载物台分离,以使供体膜与第一辊单元接触。 第二辊单元设置在台架上,与第一辊单元接触供体膜,并且通过与第一辊单元沿长度方向移动,使施主膜从受主衬底分层。

    Method of manufacturing organic light emitting device and method of manufacturing organic light emitting display apparatus using the same
    8.
    发明授权
    Method of manufacturing organic light emitting device and method of manufacturing organic light emitting display apparatus using the same 失效
    制造有机发光装置的方法和使用该有机发光装置的有机发光显示装置的制造方法

    公开(公告)号:US08435817B2

    公开(公告)日:2013-05-07

    申请号:US13267643

    申请日:2011-10-06

    申请人: Jin-Han Park

    发明人: Jin-Han Park

    IPC分类号: H01L21/00

    CPC分类号: H01L51/0013 H01L51/003

    摘要: A method of manufacturing an organic light emitting device that readily increases the characteristics of an intermediate layer having an organic light emitting layer, and a method of manufacturing an organic light emitting display apparatus. The method of manufacturing an organic light emitting device includes preparing a substrate having a first electrode; disposing the substrate on a base member; disposing a donor film that covers the substrate and contacts the base member exposed around the substrate; combining the base member and the donor film; forming an intermediate layer having an organic light emitting layer on the first electrode by performing a transfer process in a laser thermal transfer apparatus after placing the base member and the donor film combined with each other with the substrate interposed therebetween in the laser thermal transfer apparatus; and forming a second electrode on the intermediate layer.

    摘要翻译: 一种易于提高具有有机发光层的中间层的特性的有机发光元件的制造方法以及有机发光显示装置的制造方法。 制造有机发光器件的方法包括制备具有第一电极的衬底; 将基板设置在基部构件上; 设置覆盖基板的施主膜,并接触暴露在基板周围的基底部件; 组合基底构件和供体膜; 通过在激光热转印装置中将基片和施主膜彼此组合放置在基片之间进行转印处理,在第一电极上形成具有有机发光层的中间层; 以及在所述中间层上形成第二电极。

    METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, SURFACE TREATMENT DEVICE FOR ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS
    9.
    发明申请
    METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, SURFACE TREATMENT DEVICE FOR ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS 有权
    有机发光显示装置的制造方法,有机发光显示装置的表面处理装置和有机发光显示装置

    公开(公告)号:US20110127507A1

    公开(公告)日:2011-06-02

    申请号:US12954310

    申请日:2010-11-24

    IPC分类号: H01L51/00 H01L21/28 G21K5/00

    摘要: Provided are a method of manufacturing an organic light emitting display apparatus, a surface treatment device for an organic light emitting display apparatus, and an organic light emitting display apparatus. To easily form organic emissive layers, the method includes: forming a first electrode on a substrate; forming on the first electrode a pixel defining layer having openings that expose predetermined portions of the first electrode; forming a charge carrying layer on the pixel defining layer and the first electrode exposed through the openings; hydrophobically treating portions of a surface of the charge carrying layer selectively, wherein the portions do not correspond to the openings, using a laser; forming organic emissive layers on the charge carrying layer; and forming a second electrode on the organic emissive layers so as to be electrically connected with the organic emissive layers.

    摘要翻译: 提供一种制造有机发光显示装置的方法,有机发光显示装置的表面处理装置和有机发光显示装置。 为了容易地形成有机发光层,该方法包括:在基板上形成第一电极; 在所述第一电极上形成具有露出所述第一电极的预定部分的开口的像素限定层; 在所述像素限定层和通过所述开口暴露的所述第一电极上形成电荷承载层; 选择性地处理电荷载体层的表面的部分,其中使用激光将部分不对应于开口; 在电荷载体层上形成有机发光层; 以及在所述有机发光层上形成第二电极以与所述有机发光层电连接。