公开(公告)号：US4523885A

公开(公告)日：1985-06-18

申请号：US483724

申请日：1983-04-11

申请人： Christopher J. Bayne ,  Joseph L. Lambert ,  Graham E. Collyer

发明人： Christopher J. Bayne ,  Joseph L. Lambert ,  Graham E. Collyer

IPC分类号： C30B31/10 ,  C30B33/00 ,  F27D5/00

CPC分类号： C30B31/103 ,  C30B33/005 ,  Y10S414/141

摘要： Apparatus for introducing silicon wafers in magazines into a process tube of a furnace or diffusion oven. At least two spaced silica tubes closed at the end next adjacent the process tube constitute supporting members for the loaded magazines and a clamping device holds and supports said members cantilever-fashion by that end thereof remote from the process tube. Motor means are associated with the clamping device for moving the supporting members with the loaded magazines thereon into and out of the process tube in a substantially horizontal direction in such a manner that the magazines and their supporting members remain entirely suspended throughout the loading, processing and unloading operations: thus no part thereof comes into contact with the interior wall of the process tube. The silica tubes preferably constitute a sheathing surrounding inserts in two or more sections fitting one within the other: the insert nearest the furnace is preferably silicon carbide and the insert remote from the furnace is preferably sintered alumina.

摘要翻译： 用于将杂志中的硅晶片引入炉或扩散炉的工艺管中的装置。 在靠近处理管的端部处封闭的至少两个隔开的二氧化硅管构成用于装载的盒的支撑构件，并且夹紧装置保持和支撑所述构件的悬臂方式，其远离工艺管的端部。 电动机装置与夹紧装置相关联，用于将支撑构件与装载的箱体在基本上水平的方向上移入和移出工艺管，使得杂志及其支撑构件在整个装载， 卸载操作：因此其任何部分都不会与处理管的内壁接触。 二氧化硅管优选构成在两个或更多个部分中的两个或多个部分中的护套围绕另一个安装：最接近炉的插入件优选为碳化硅，并且远离炉的刀片优选为烧结氧化铝。