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    Process for fabricating patterned magnetic recording media
    1.
    发明授权
    Process for fabricating patterned magnetic recording media 有权
    制造图案化磁记录介质的方法

    公开(公告)号：US07704614B2

    公开(公告)日：2010-04-27

    申请号：US11583845

    申请日：2006-10-20

    申请人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

    发明人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

    IPC分类号： G11B5/66

    CPC分类号： G11B5/855 ,  G11B5/667 ,  G11B5/732

    摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

    摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。

    E-BEAM WRITE FOR HIGH-PRECISION DOT PLACEMENT
    2.
    发明申请
    E-BEAM WRITE FOR HIGH-PRECISION DOT PLACEMENT 有权
    电子束写入高精度放样

    公开(公告)号：US20100039727A1

    公开(公告)日：2010-02-18

    申请号：US12192338

    申请日：2008-08-15

    申请人： David S. Kuo ,  Kim Y. Lee

    发明人： David S. Kuo ,  Kim Y. Lee

    IPC分类号： G11B5/596

    CPC分类号： G11B5/02 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/746 ,  G11B2005/0005

    摘要： A recording system for magnetic storage devices, including a beam column for generating a beam, a platform for moving a magnetic storage medium relative to the beam, and a signal generator for sequentially, or in a continuously alternating manner, deflecting the beam. In turn, the beam is directed according to displacement of dots on the extent of the magnetic storage medium such that dots of a plurality of dot groupings can be written to on the extent during a single pass of the beam column above the extent.

    摘要翻译： 用于磁存储装置的记录系统，包括用于产生光束的光束柱，用于相对于光束移动磁存储介质的平台以及用于顺序地或以连续交替的方式偏转光束的信号发生器。 反过来，光束根据磁存储介质的范围上的点的位移被引导，使得多个点分组的点可以在光束柱的单次通过高于该范围的程度上被写入。

    DISCRETE TRACK MAGNETIC MEDIA WITH DOMAIN WALL PINNING SITES
    3.
    发明申请
    DISCRETE TRACK MAGNETIC MEDIA WITH DOMAIN WALL PINNING SITES 失效
    离散轨迹磁场介质与域墙密封站点

    公开(公告)号：US20090135518A1

    公开(公告)日：2009-05-28

    申请号：US11946535

    申请日：2007-11-28

    申请人： Dieter Weller ,  Timothy J. Klemmer ,  Kim Y. Lee

    发明人： Dieter Weller ,  Timothy J. Klemmer ,  Kim Y. Lee

    IPC分类号： G11B5/33 ,  G11B5/82

    CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/012 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865 ,  G11B2005/0029

    摘要： A magnetic recording medium with domain wall pinning sites including a substrate, a soft magnetic underlayer, and a magnetic recording layer overlying the soft magnetic underlayer. In one embodiment the magnetic recording layer has at least two grooves providing a track having first and second sidewalls formed by the grooves. The sidewalls provide a plurality of pinning sites formed between the sidewalls for pinning magnetic domain walls in the track. At least one of the pinning sites includes a first indentation in the first sidewall and a paired second indentation in the second sidewall. In one embodiment data can be stored within the magnetic recording layer by positioning a write head adjacent the track and inducing at least two magnetic domains defining a domain wall. The domain wall migrates to one of the pinning sites in the track.

    摘要翻译： 具有域壁钉扎位置的磁记录介质，包括衬底，软磁性底层和覆盖软磁性底层的磁记录层。 在一个实施例中，磁记录层具有至少两个沟槽，提供具有由凹槽形成的第一和第二侧壁的轨道。 侧壁提供形成在侧壁之间的多个钉扎部位，用于钉扎轨道中的磁畴壁。 钉扎位置中的至少一个包括第一侧壁中的第一凹陷和第二侧壁中的成对的第二凹陷。 在一个实施例中，数据可以通过将写头定位在轨道附近并且诱导限定域壁的至少两个磁畴来存储在磁记录层内。 域墙迁移到轨道中的一个钉扎位置。

    Elimination of write head plating defects using high activation chemically amplified resist
    5.
    发明授权
    Elimination of write head plating defects using high activation chemically amplified resist 失效
    使用高激活化学放大抗蚀剂消除写头电镀缺陷

    公开(公告)号：US07413845B2

    公开(公告)日：2008-08-19

    申请号：US10831412

    申请日：2004-04-23

    申请人： Kim Y. Lee ,  Dennis Richard McKean

    发明人： Kim Y. Lee ,  Dennis Richard McKean

    IPC分类号： G03F7/00

    CPC分类号： G03F7/405 ,  G03F7/0392 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49021

    摘要： Methods of forming a component of a thin film magnetic head and improving the plating of a component of a thin film magnetic head are provided. The methods include the use of a high activation energy chemically amplified photoresist (CARS) that is contacted with a low pH high saturation magnetic moment plating solution to form a magnetic head component that is essentially free of plating defects. The methods find utility in hard disk drive applications, such as in the manufacture of magnetic poles for the write head of a hard disk drive.

    摘要翻译： 提供了形成薄膜磁头的部件并改善薄膜磁头的部件的电镀的方法。 这些方法包括使用与低pH高饱和磁矩电镀溶液接触的高活化能化学放大光致抗蚀剂（CARS），以形成基本上没有电镀缺陷的磁头组分。 该方法可用于硬盘驱动器应用，例如用于制造用于硬盘驱动器的写头的磁极。

    Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist
    6.
    发明申请
    Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist 审中-公开
    使用混合抗蚀剂制造图案化记录介质的主压模/打印机的方法

    公开(公告)号：US20080113157A1

    公开(公告)日：2008-05-15

    申请号：US11595894

    申请日：2006-11-13

    申请人： Kim Y. Lee ,  Hong Ying Wang ,  Shih-Fu Lee ,  David S. Kuo ,  Koichi Wago ,  Dieter K. Weller

    发明人： Kim Y. Lee ,  Hong Ying Wang ,  Shih-Fu Lee ,  David S. Kuo ,  Koichi Wago ,  Dieter K. Weller

    IPC分类号： G03F7/00 ,  B32B3/00

    CPC分类号： G03F7/095 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10T428/24355

    摘要： A method of fabricating a master stamper/imprinter for manufacturing a patterned recording medium by nano-imprint lithography comprises steps of: (a) providing a substrate having a surface; (b) forming a layer of a hybrid resist material on the surface, the resist layer having an exposed upper surface; (c) subjecting selected areas of the exposed upper surface of the resist layer to an energy beam to form therein a latent image of a topographical pattern to be formed in the resist layer and having a correspondence to a pattern to be formed in a patterned recording medium; and (d) developing the latent image into the topographical pattern in the resist layer, wherein only those areas of the resist layer which have received an energy beam exposure dose between a positive-tone threshold dose D0p and a negative-tone threshold dose D0n are developed.

    摘要翻译： 制造用于通过纳米压印光刻制造图案化记录介质的主压模/印刷机的方法包括以下步骤：（a）提供具有表面的基板; （b）在所述表面上形成混合抗蚀剂材料层，所述抗蚀剂层具有暴露的上表面; （c）使抗蚀剂层的暴露的上表面的选定区域能量束在其中形成要在抗蚀剂层中形成的形貌图案的潜像，并且与图案化记录中形成的图案对应 中; 并且（d）将潜像显影成抗蚀剂层中的形貌图案，其中只有已经接收了能量束曝光的抗蚀剂层的那些区域剂量在正音阈值剂量D 0 P 0和 开发出负色调阈值剂量D 0n 。

    Methods of making magnetic write heads with use of linewidth shrinkage techniques
    7.
    发明授权
    Methods of making magnetic write heads with use of linewidth shrinkage techniques 失效
    使用线宽收缩技术制造磁头的方法

    公开(公告)号：US07343666B2

    公开(公告)日：2008-03-18

    申请号：US10881782

    申请日：2004-06-30

    申请人： Kim Y. Lee ,  Jyh-Shuey Jerry Lo ,  Dennis Richard McKean

    发明人： Kim Y. Lee ,  Jyh-Shuey Jerry Lo ,  Dennis Richard McKean

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： In one illustrative example, a method for use in making a magnetic write head includes the steps of forming a first pole piece layer of a first pole piece; forming a patterned resist over the first pole piece layer; electroplating a pedestal over the first pole piece layer within a channel of the patterned resist; electroplating a metal gap layer over the pedestal within the channel of the patterned resist; forming a resist channel shrinking film over the patterned resist; baking the resist channel shrinking film over the patterned to thereby reduce a width of the channel; removing the resist channel shrinking film; electroplating a second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the pedestal, using the second pole piece as a mask, to form a central notched pedestal having side walls with angled slopes.

    摘要翻译： 在一个说明性示例中，用于制造磁写头的方法包括以下步骤：形成第一极片的第一极片层; 在所述第一极片层上形成图案化抗蚀剂; 在图案化的抗蚀剂的通道内的第一极片层上电镀一个基座; 在图案化的抗蚀剂的通道内的基座上方电镀金属间隙层; 在图案化的抗蚀剂上形成抗蚀剂通道收缩膜; 在图案上烘烤抗蚀剂通道收缩膜，从而减小通道的宽度; 去除抗蚀剂通道收缩膜; 在图案化的抗蚀剂的减小宽度的通道内电镀第二极片; 去除图案化的抗蚀剂; 并使用第二极片作为掩模铣削基座，以形成具有倾斜斜面的侧壁的中心凹口底座。

    Method for fabricating a pole tip in a magnetic transducer
    9.
    发明授权
    Method for fabricating a pole tip in a magnetic transducer 有权
    在磁换能器中制造极尖的方法

    公开(公告)号：US07186348B2

    公开(公告)日：2007-03-06

    申请号：US10882883

    申请日：2004-06-30

    申请人： Tsung Yuan Chen ,  David Patrick Druist ,  Quang Le ,  Kim Y. Lee ,  Chun-Ming Wang ,  Howard Gordon Zolla

    发明人： Tsung Yuan Chen ,  David Patrick Druist ,  Quang Le ,  Kim Y. Lee ,  Chun-Ming Wang ,  Howard Gordon Zolla

    IPC分类号： G11B5/187

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032

    摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.

    摘要翻译： 描述了制造具有梯形极片尖端的磁头的方法。 沉积主极片的主体，然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。