公开(公告)号：US08293065B2

公开(公告)日：2012-10-23

申请号：US11952707

申请日：2007-12-07

申请人： Sang-Min Park ,  Eun-Sub Lim ,  Won-Seop Chun ,  Man-Heon Park

发明人： Sang-Min Park ,  Eun-Sub Lim ,  Won-Seop Chun ,  Man-Heon Park

IPC分类号： C23F1/00

CPC分类号： G02F1/1303 ,  H01L21/6708 ,  H01L21/6734 ,  H01L21/67748

摘要： A substrate etching apparatus includes: a cassette to receive a substrate that has finished a previous process, and transfer the substrate; a first robot to take the substrate out of the cassette; a second robot to receive the substrate from the first robot and move the substrate mounted thereon vertically up and down; an etching cassette comprising a support to support the substrate and a holder to fix the substrate loaded from the second robot; a cassette fixing unit to fix at least one or more etching cassettes and being rotated at a pre-set angle to allow the substrate to be disposed perpendicular to the ground; and an etching unit to etch the substrate disposed perpendicular to the ground by the cassette fixing unit.

摘要翻译： 基板蚀刻装置包括：用于接收已经完成先前处理的基板并传送基板的盒; 第一个机器人将基板从盒中取出; 第二机器人，用于从第一机器人接收基板，并且使安装在其上的基板垂直上下移动; 蚀刻盒，其包括用于支撑所述基板的支撑件和用于固定从所述第二机器人装载的所述基板的保持器; 盒固定单元，用于固定至少一个或多个蚀刻盒，并以预定角度旋转以允许基板垂直于地面设置; 以及蚀刻单元，用于蚀刻由盒固定单元垂直于地面设置的基板。

公开(公告)号：US20080135176A1

公开(公告)日：2008-06-12

申请号：US11952707

申请日：2007-12-07

申请人： Sang-Min Park ,  Eun-Sub Lim ,  Won-Seop Chun ,  Man-Heon Park

发明人： Sang-Min Park ,  Eun-Sub Lim ,  Won-Seop Chun ,  Man-Heon Park

IPC分类号： C23F1/08 ,  H01L21/306

CPC分类号： G02F1/1303 ,  H01L21/6708 ,  H01L21/6734 ,  H01L21/67748

摘要： A substrate etching apparatus includes: a cassette to receive a substrate that has finished a previous process, and transfer the substrate; a first robot to take the substrate out of the cassette; a second robot to receive the substrate from the first robot and move the substrate mounted thereon vertically up and down; an etching cassette comprising a support to support the substrate and a holder to fix the substrate loaded from the second robot; a cassette fixing unit to fix at least one or more etching cassettes and being rotated at a pre-set angle to allow the substrate to be disposed perpendicular to the ground; and an etching unit to etch the substrate disposed perpendicular to the ground by the cassette fixing unit.

摘要翻译： 基板蚀刻装置包括：用于接收已经完成先前处理的基板并传送基板的盒; 第一个机器人将基板从盒中取出; 第二机器人，用于从第一机器人接收基板，并且使安装在其上的基板垂直上下移动; 蚀刻盒，其包括用于支撑所述基板的支撑件和用于固定从所述第二机器人装载的所述基板的保持器; 盒固定单元，用于固定至少一个或多个蚀刻盒，并以预定角度旋转以允许基板垂直于地面设置; 以及蚀刻单元，用于蚀刻由盒固定单元垂直于地面设置的基板。