公开(公告)号：US20090152440A1

公开(公告)日：2009-06-18

申请号：US12345566

申请日：2008-12-29

Applicant: Eric Herbert Altendorf ,  Scott Harsila ,  Mathew David Watson

Inventor： Eric Herbert Altendorf ,  Scott Harsila ,  Mathew David Watson

IPC: G02B27/40

CPC classification number: G01B11/0608 ,  G01J1/0242 ,  G01J1/0411 ,  G01N21/8806 ,  G02B7/32 ,  G02B7/36 ,  G02B21/245 ,  G02B27/0075

Abstract: An extended range focus sensor is provided. In various embodiments, the focus sensor may include a relay lens assembly to image a plane between an objective lens and the relay lens arrangement to a plane near an entrance pupil of a focus detector arrangement of the focus sensor. In some embodiments, the objective lens pupil is imaged onto the focus detector entrance pupil. In some embodiments, an illumination beam passes through the relay lens arrangement and is magnified on its way to be output by the objective lens, and the reflected focus detection beam passes back through the objective lens and the relay lens arrangement and is reduced prior to being input to the focus detector arrangement. In some embodiments, the focus detector arrangement may comprising a broad range focus detector combined with a high resolution Shack-Hartmann focus detector, and in others a single extended range Shack-Hartmann focus detector is used.

Abstract translation: 提供扩展距离对焦传感器。 在各种实施例中，焦点传感器可以包括中继透镜组件，用于将物镜和中继透镜装置之间的平面成像到焦点传感器的焦点检测器装置的入射光瞳附近的平面。 在一些实施例中，将物镜光瞳成像到焦点检测器入射光瞳上。 在一些实施例中，照明光束通过中继透镜装置，并在其被物镜输出的路径上被放大，并且反射的焦点检测光束通过物镜和中继透镜装置返回，并且在被放大之前被减小 输入到焦点检测器装置。 在一些实施例中，焦点检测器装置可以包括与高分辨率Shack-Hartmann聚焦检测器组合的宽范围焦点检测器，并且在其他实施例中，使用单个扩展范围Shack-Hartmann聚焦检测器。

公开(公告)号：US20080100850A1

公开(公告)日：2008-05-01

申请号：US11590964

申请日：2006-10-31

Applicant: Mathew David Watson

Inventor： Mathew David Watson

IPC: G01B11/24 ,  G01B11/14

CPC classification number: G01B11/0608

Abstract: A surface height and focus sensing system is provided. In one embodiment, a wavefront sensor is used in combination with a collimation adjustment element which drives the system such that an illumination focus height matches the workpiece surface height, which produces a null output from the wavefront sensor. Under the null condition, the amount of collimation adjustment is directly related to the workpiece surface height, and the resulting height determination is relatively insensitive to the workpiece surface optical properties. In one embodiment, the amount of collimation adjustment is determined according to the control signal for the collimation adjustment element. In another embodiment, a second wavefront sensor is utilized to measure the amount of collimation adjustment.

Abstract translation: 提供了表面高度和焦点感测系统。 在一个实施例中，波前传感器与准直调整元件结合使用，该准直调节元件驱动系统，使得照明焦点高度与工件表面高度相匹配，从而产生来自波前传感器的零输出。 在零点条件下，准直调整量与工件表面高度直接相关，所得到的高度确定对工件表面的光学性能相对不敏感。 在一个实施例中，根据准直调节元件的控制信号确定准直调整量。 在另一实施例中，使用第二波前传感器来测量准直调整量。

公开(公告)号：US20080100829A1

公开(公告)日：2008-05-01

申请号：US11689416

申请日：2007-03-21

Applicant: Mathew David Watson

Inventor： Mathew David Watson

IPC: G01J1/00

CPC classification number: G01B11/0608

Abstract: A surface height and focus sensing system is provided. In one embodiment, an illumination focus sensor is used in combination with a collimation adjustment element which drives the system such that an illumination focus height matches the workpiece surface height, which produces a null output from the illumination focus sensor. Under the null condition, the amount of collimation adjustment is directly related to the workpiece surface height, and the resulting height determination is relatively insensitive to the workpiece surface optical properties. In one embodiment, the amount of collimation adjustment is determined according to the control signal for the collimation adjustment element. In another embodiment, a collimation adjustment sensor is utilized to measure the amount of collimation adjustment.

Abstract translation: 提供了表面高度和焦点感测系统。 在一个实施例中，照明聚焦传感器与准直调整元件组合使用，该准直调节元件驱动系统，使得照明焦点高度与工件表面高度相匹配，从而产生来自照明聚焦传感器的零输出。 在零点条件下，准直调整量与工件表面高度直接相关，所得到的高度确定对工件表面的光学性能相对不敏感。 在一个实施例中，根据准直调节元件的控制信号确定准直调整量。 在另一个实施例中，使用准直调节传感器来测量准直调整量。

公开(公告)号：US07728961B2

公开(公告)日：2010-06-01

申请号：US11689416

申请日：2007-03-21

Applicant: Mathew David Watson

Inventor： Mathew David Watson

IPC: G01J1/00

CPC classification number: G01B11/0608

Abstract: A surface height and focus sensing system is provided. In one embodiment, an illumination focus sensor is used in combination with a collimation adjustment element which drives the system such that an illumination focus height matches the workpiece surface height, which produces a null output from the illumination focus sensor. Under the null condition, the amount of collimation adjustment is directly related to the workpiece surface height, and the resulting height determination is relatively insensitive to the workpiece surface optical properties. In one embodiment, the amount of collimation adjustment is determined according to the control signal for the collimation adjustment element. In another embodiment, a collimation adjustment sensor is utilized to measure the amount of collimation adjustment.

Abstract translation: 提供了表面高度和焦点感测系统。 在一个实施例中，照明聚焦传感器与准直调整元件组合使用，该准直调节元件驱动系统，使得照明焦点高度与工件表面高度相匹配，从而产生来自照明聚焦传感器的零输出。 在零点条件下，准直调整量与工件表面高度直接相关，所得到的高度确定对工件表面的光学性能相对不敏感。 在一个实施例中，根据准直调节元件的控制信号确定准直调整量。 在另一个实施例中，使用准直调节传感器来测量准直调整量。