-
公开(公告)号:US07279759B2
公开(公告)日:2007-10-09
申请号:US10547041
申请日:2004-02-18
申请人: Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
发明人: Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
CPC分类号: G01L9/0042 , G01F1/6845 , G01N7/10
摘要: A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.
摘要翻译: 提供了具有至少一个膜的微机械传感器和用于制造微机械传感器的方法。 膜由容纳在周围的第二材料中的第一材料制成,并且膜构造成用于感测周围的介质。 至少部分地,膜在膜边缘上的断裂点被第三材料增强。 膜边缘的加强增加了膜和传感器的稳定性,从而增加了膜的使用寿命。