公开(公告)号：US20050259246A1

公开(公告)日：2005-11-24

申请号：US11133367

申请日：2005-05-20

申请人： Tae-Soo Kang ,  Kyoo-Chul Cho ,  Soo-Yeol Choi ,  Sam-Dong Choi

发明人： Tae-Soo Kang ,  Kyoo-Chul Cho ,  Soo-Yeol Choi ,  Sam-Dong Choi

IPC分类号： H01L21/66 ,  G01N21/47 ,  G01N21/88 ,  G01N21/95

CPC分类号： G01N21/47 ,  G01N21/9501

摘要： An apparatus and method for detecting a surface status. The method includes generating first and second pulse sequences and irradiating the first and second pulse sequences into a given surface. Light from the first and second pulses may be scattered by the given surface and analyzed to determine the status of the given surface. The apparatus includes a device for generating pulses which contact a given surface at different incident angles. The light scattered from the pulses may be analyzed at a determining part to determine a status of the given surface. In another embodiment, the method includes generating first and second pulse sequences and adjusting a path of at least a portion of at least one of the first and second pulse sequences such that the first and second pulse sequences are incident upon a given surface at different incident angles.

摘要翻译： 一种用于检测表面状态的装置和方法。 该方法包括产生第一和第二脉冲序列并将第一和第二脉冲序列照射到给定的表面中。 来自第一和第二脉冲的光可以被给定的表面散射并且被分析以确定给定表面的状态。 该装置包括用于产生以不同入射角接触给定表面的脉冲的装置。 可以在确定部分分析从脉冲散射的光以确定给定表面的状态。 在另一个实施例中，该方法包括产生第一和第二脉冲序列并且调整第一和第二脉冲序列中的至少一个的至少一部分的路径，使得第一和第二脉冲序列在不同事件处入射到给定表面上 角度。