公开(公告)号：US10297419B2

公开(公告)日：2019-05-21

申请号：US13981175

申请日：2012-01-25

Applicant: Shahedul Hoque ,  Hajime Kawano

Inventor： Shahedul Hoque ,  Hajime Kawano

IPC: H01J37/28 ,  H01J37/147

Abstract: The present invention has an object to provide a scanning electron microscope which suppresses a potential gradient produced by preliminary charge without changing lens conditions of an electron microscope. As an aspect to achieve the above object, there is proposed a scanning electron microscope in which a scanning deflector is controlled so that a second beam is scanned to detect electrons released from a sample after scanning a first beam on the sample to charge the surface of the sample and the first beam is scanned so that charge density in a surrounding part within a scanned area by the first beam is increased relatively as compared with a center part within the scanned area by the first beam.

公开(公告)号：US20130306866A1

公开(公告)日：2013-11-21

申请号：US13981175

申请日：2012-01-25

Applicant: Shahedul Hoque ,  Hajime Kawano

Inventor： Shahedul Hoque ,  Hajime Kawano

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J37/1474 ,  H01J2237/004 ,  H01J2237/0048 ,  H01J2237/281

Abstract: The present invention has an object to provide a scanning electron microscope which suppresses a potential gradient produced by preliminary charge without changing lens conditions of an electron microscope. As an aspect to achieve the above object, there is proposed a scanning electron microscope in which a scanning deflector is controlled so that a second beam is scanned to detect electrons released from a sample after scanning a first beam on the sample to charge the surface of the sample and the first beam is scanned so that charge density in a surrounding part within a scanned area by the first beam is increased relatively as compared with a center part within the scanned area by the first beam.

Abstract translation: 本发明的目的是提供一种扫描电子显微镜，其在不改变电子显微镜的透镜条件的情况下抑制由预充电产生的电位梯度。 作为实现上述目的的一个方面，提出了一种扫描电子显微镜，其中扫描偏转器被控制，使得扫描第二光束以在扫描样品上的第一光束之后检测从样品释放的电子，从而对 对样品和第一光束进行扫描，使得与第一光束的扫描区域内的中心部分相比，第一光束在扫描区域内的周围部分的电荷密度相对增加。