公开(公告)号：US06774613B1

公开(公告)日：2004-08-10

申请号：US09980122

申请日：2002-04-05

申请人： Thomas Becker ,  Stephan Muehlberger ,  Gerhard Mueller

发明人： Thomas Becker ,  Stephan Muehlberger ,  Gerhard Mueller

IPC分类号： G01N2700

CPC分类号： G01N27/12 ,  G01N33/0011

摘要： A semiconducting gas sensor includes a gas-sensitive layer, a heater for heating the layer to a defined measuring temperature, and contact electrodes for measuring the electrical resistance of the gas-sensitive layer enclosed within a microchamber, in which the gas-sensitive layer is arranged. The chamber can be sealed from the outside, and is constructed so that the chamber volume is small enough to allow at least one component of the gas or gas mixture that is to be analyzed to be at least largely exhausted via conversion on the gas-sensitive layer, within a predetermined measuring interval. With the limited gas store and the conversion of a component of the gas during the measurement process, gases or gas mixtures comprising several components can be analyzed. In this, the measuring signal is reexamined following the conversion of at least one component. Within the chamber, several sensor elements may be arranged with gas-sensitive layers, and may be operated at different temperatures. One gas sensor system, for example, is comprised of at least two semiconducting gas sensors having microchambers, which are arranged within a system of gas lines and valves, and can be filled individually.

摘要翻译： 半导体气体传感器包括气体敏感层，用于将层加热到限定的测量温度的加热器和用于测量封闭在微室内的气敏层的电阻的接触电极，其中气敏层是 安排。 室可以从外部密封，并且被构造成使得室容积足够小，以允许待分析的气体或气体混合物的至少一个组分通过气体敏感的转化至少大部分被排出 层，在预定的测量间隔内。 在测量过程中，气体储存有限和气体成分的转化，可以分析包含若干组分的气体或气体混合物。 在此，在至少一个组件的转换之后重新检查测量信号。 在室内，几个传感器元件可以布置有气体敏感层，并且可以在不同的温度下操作。 例如，一个气体传感器系统由具有微室的至少两个半导体气体传感器组成，其布置在气体管线和阀的系统内，并且可以单独填充。