公开(公告)号：US12249501B2

公开(公告)日：2025-03-11

申请号：US18674025

申请日：2024-05-24

Applicant: ASM IP Holding B.V.

Inventor： Hoyoun Jang ,  Gopu Krishna

IPC: H01J9/36 ,  H01J9/24 ,  H01J9/30 ,  H01J9/34 ,  H01J37/32

Abstract: A method of providing a stable connector used in a deposition apparatus is presented. The method may include forming a dome-shaped electrode connector inside of a ceramic material, drilling out a part of the ceramic material along with a portion of the dome-shaped electrode connector to flatten the electrode connector, and bonding a rod into a remaining part of the electrode connector. The method would provide a stable electrode connector which could hold the entire length of the rod which is bonded onto it. The length of the flattened electrode connector could be 5 mm.

公开(公告)号：US20240404779A1

公开(公告)日：2024-12-05

申请号：US18674025

申请日：2024-05-24

Applicant: ASM IP Holding B.V.

Inventor： Hoyoun Jang ,  Gopu Krishna

IPC: H01J9/36 ,  H01J9/24 ,  H01J9/30 ,  H01J37/32

Abstract: A method of providing a stable connector used in a deposition apparatus is presented. The method may comprise forming a dome-shaped electrode connector inside of a ceramic material, drilling out a part of the ceramic material along with a portion of the dome-shaped electrode connector to flatten the electrode connector; and bonding a rod into a remaining part of the electrode connector. The method would provide a stable electrode connector which could hold the entire length of the rod which is bonded onto it. The length of the flattened electrode connector could be 5 mm.