公开(公告)号：US12183546B2

公开(公告)日：2024-12-31

申请号：US17196374

申请日：2021-03-09

Applicant: ASM IP Holding B.V.

Inventor： KiChul Um ,  YongGyu Han ,  SangJean Jeon ,  DooHan Kim ,  SangYeop Lee

IPC: H01J37/32 ,  C23C16/505

Abstract: A substrate processing apparatus capable of removing signal interference between reactors includes: a first reactor, a second reactor adjacent to the first reactor, and a power generator configured to supply first power to the first reactor and supply second power to the second reactor, wherein the power generator is further configured to synchronize phases of the first power and the second power.

公开(公告)号：US20250087460A1

公开(公告)日：2025-03-13

申请号：US18958281

申请日：2024-11-25

Applicant: ASM IP Holding B.V.

Inventor： KiChul Um ,  YongGyu Han ,  SangJean Jeon ,  DooHan Kim ,  SangYeop Lee

IPC: H01J37/32 ,  C23C16/505

Abstract: A substrate processing apparatus capable of removing signal interference between reactors includes: a first reactor, a second reactor adjacent to the first reactor, and a power generator configured to supply first power to the first reactor and supply second power to the second reactor, wherein the power generator is further configured to synchronize phases of the first power and the second power.

公开(公告)号：US20210287878A1

公开(公告)日：2021-09-16

申请号：US17196374

申请日：2021-03-09

Applicant: ASM IP Holding B.V.

Inventor： KiChul Um ,  YongGyu Han ,  SangJean Jeon ,  DooHan Kim ,  SangYeop Lee

IPC: H01J37/32 ,  H03F3/21 ,  H03K5/24 ,  H01P5/16 ,  C23C16/505 ,  C23C16/458

Abstract: A substrate processing apparatus capable of removing signal interference between reactors includes: a first reactor, a second reactor adjacent to the first reactor, and a power generator configured to supply first power to the first reactor and supply second power to the second reactor, wherein the power generator is further configured to synchronize phases of the first power and the second power.