公开(公告)号：US20180373170A1

公开(公告)日：2018-12-27

申请号：US16062919

申请日：2016-12-02

Applicant: ASML NETHERLANDS B.V.

Inventor： Paul JANSSEN ,  Johan Hendrik KLOOTWIJK ,  Wilhelmus Theodorus Anthonius Johannes VAN DEN EINDEN ,  Alexandar Nikolov ZDRAVKOV

IPC: G03F7/20 ,  G03F1/64

Abstract: Methods of manufacturing a membrane assembly where, in one arrangement, a stack includes a planar substrate and at least one membrane layer. The planar substrate includes an inner region, a border region around the inner region, a bridge region around the border region and an edge region around the bridge region. The inner region and a first portion of the bridge region are removed. The membrane assembly after removal has: a membrane formed from the at least one membrane layer, a border holding the membrane, the border formed from the border region, an edge section around the border, the edge section formed from the edge region, a bridge between the border and the edge section, the bridge formed from the at least one membrane layer and a second portion of the bridge region. The method further involves separating the edge section from the border by cutting or breaking the bridge.